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SILICON CARBIDE MEMS OSCILLATOR

Pehlivanoglu, Ibrahim Engin
http://rave.ohiolink.edu/etdc/view?acc_num=case1196372276

Abstract Details

2008, Master of Sciences, Case Western Reserve University, Electrical Engineering.
An oscillator employing a 3C polycrystalline silicon carbide (3C-SiC) folded-beam microelectromechanical (MEM) resonator and silicon discrete electronics has been designed and implemented. The rocking resonant mode of the device is chosen in order to obtain an adequate power handling capability without excessive mechanical motion, which would decrease resonator durability. This mode of resonance is advantageous over the lateral mode of a surface-micromachined folded-beam resonator in that respect. The resonator biased with 10V exhibits a quality factor of 9480 at 30.2 kHz of resonance under 1 mToor vacuum environment. The oscillator outputs a sinusoidal waveform at 30.2 kHz with -17 dBm power and achieves a phase noise of -74 dBc/Hz at 5 Hz offset from carrier frequency. The study shows that oscillator phase noise is ultimately limited by the resonator power handling capability and noise floor from the interface electronics. The lowest achievable phase noise of -78 dBc/Hz is measured at 12 Hz offset frequency, closely matched with the analytical result of -77 dBc/Hz defined by the signal-to-noise-floor ratio (SNfR). The oscillation frequency exhibits ±16 ppm stability over a period of 100 hours including all environment effects.
Darrin Young (Advisor)
73 p.
MEMS; silicon carbide; resonator; oscillator; resonance; micromachine; harsh environment

Recommended Citations

Citations

  • Pehlivanoglu, I. E. (2008). SILICON CARBIDE MEMS OSCILLATOR [Master's thesis, Case Western Reserve University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=case1196372276

    APA Style (7th edition)

  • Pehlivanoglu, Ibrahim. SILICON CARBIDE MEMS OSCILLATOR. 2008. Case Western Reserve University, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=case1196372276.

    MLA Style (8th edition)

  • Pehlivanoglu, Ibrahim. "SILICON CARBIDE MEMS OSCILLATOR." Master's thesis, Case Western Reserve University, 2008. http://rave.ohiolink.edu/etdc/view?acc_num=case1196372276

    Chicago Manual of Style (17th edition)

case1196372276
1,552
© 2007, all rights reserved.
This open access ETD is published by Case Western Reserve University School of Graduate Studies and OhioLINK.