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Development of Microfabricated Electrochemical Sensors for Environmental Parameter Measurements Applicable to Corrosion Evaluation and Gaseous Oxygen Detection

YU, JINSONG
http://rave.ohiolink.edu/etdc/view?acc_num=case1206981091

Abstract Details

2008, Doctor of Philosophy, Case Western Reserve University, Chemical Engineering.
Solid state electrochemical sensors have demonstrated their usefulness for measuring the physical and the chemical properties of the electrolytes and in both liquid and gaseous phases. These electrochemical sensors provide rapid response to property/concentration changes with high sensitivity, excellent reproducibility, and good long-term stability. Using thin and thick film microfabrication techniques, these solid state electrochemical sensors can be further improved and miniaturized to incorporate additional advantages such as high resolution, small feature size (μm or even nm), small required sample volume, small ohmic potential drop, improved signal to noise ratio, and reduced fabrication cost.Advanced analytical and computational methods for the evolution of the environment on metal surfaces require data for the environmental properties of thin layers of moisture, moist particulates, and deposits that will affect the corrosion performance of metals. The advanced sensor technology development and application of the sensors reported in this study address these needs. The sensor development and findings reported here are important complements to a multi-investigator program that strives for increased scientific understanding, enhanced process models, and advanced technologies for long-term corrosion performance. In the first part of this study, microfabricated electrochemical sensors for environmental parameter measurements have been developed and characterized, including Pt based thin film electrolyte solution conductivity sensor, Pd/PdO based thick film pH sensor, and Au based thick film dissolved oxygen concentration sensor. These sensors utilized AC impedance, potentiometric open circuit potential decay, and amperometric i-t techniques for conductivity, pH, and dissolved oxygen concentration measurements, respectively. In the second part of this study, a multi-component, multi-layer structured thin film high-temperature gaseous oxygen sensor incorporating two major types of gaseous oxygen sensing principles has been developed and evaluated. This sensor is capable of performing high-temperature potentiometric and amperometric measurements for gaseous oxygen concentration monitoring. Silicon-based micro fabrication processes are used in this study including photolithography patterning, thin film sputtering metallization, thick film printing technique, lift-off process, and others. The sensors developed are geometrically well defined, reproducible, mechanically robust, and potentially low cost. The test results in this study indicated that the Pt conductivity sensor can measure the conductivity of particulate layer saturated with electrolyte solutions; the Nernstian Pd/PdO pH sensor can measure electrolyte solution pH value in the alkaline region; the Au dissolved oxygen sensor can measure oxygen concentration in solution and the effective oxygen diffusion coefficient in solution and particulate layer; and the high-temperature oxygen sensor can measure gaseous oxygen concentration.
Chung-Chiun LIU (Committee Chair)
Uziel Landau (Committee Member)
Heidi Martin (Committee Member)
Kenneth Loparo (Committee Member)
189 p.
Chemical Engineering
Electrochemical sensor; Microfabrication; Corrosion evaluation; Gaseous oxygen sensor

Recommended Citations

Citations

  • YU, J. (2008). Development of Microfabricated Electrochemical Sensors for Environmental Parameter Measurements Applicable to Corrosion Evaluation and Gaseous Oxygen Detection [Doctoral dissertation, Case Western Reserve University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=case1206981091

    APA Style (7th edition)

  • YU, JINSONG. Development of Microfabricated Electrochemical Sensors for Environmental Parameter Measurements Applicable to Corrosion Evaluation and Gaseous Oxygen Detection. 2008. Case Western Reserve University, Doctoral dissertation. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=case1206981091.

    MLA Style (8th edition)

  • YU, JINSONG. "Development of Microfabricated Electrochemical Sensors for Environmental Parameter Measurements Applicable to Corrosion Evaluation and Gaseous Oxygen Detection." Doctoral dissertation, Case Western Reserve University, 2008. http://rave.ohiolink.edu/etdc/view?acc_num=case1206981091

    Chicago Manual of Style (17th edition)

case1206981091
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© 2008, all rights reserved.
This open access ETD is published by Case Western Reserve University School of Graduate Studies and OhioLINK.