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Development of a Wire Bonding Process for Microsystems Fabricated From Polyvinyl Acetate - Nanocomposite

Barnes, Andrew Charles
http://rave.ohiolink.edu/etdc/view?acc_num=case1302118642

Abstract Details

2011, Master of Sciences (Engineering), Case Western Reserve University, EECS - Electrical Engineering.
This thesis presents the development of a wire bonding process for MEMS-based neural probes fabricated from a mechanically-dynamic, polyvinyl acetate – nanocomposite (PVAc-NC). A design of experiments approach was used to optimize the bonding parameters. Bonds on PVAc-NC with 200nm Au pads exhibited pull strengths > 7 gf, exceeding the military standard of 3 gf (MIL STD 883). When the PVAc-NC was exposed to DI water, the wire bonds failed to pass the military standard. Finite element modeling was performed to assist in the design of a more robust bond pad structure. Successful wire bonds were formed on substrates coated with Parylene-C, Ti and Au. These bonds were tested in both the dry and wet states but were unable to pass the military standard. Parylene was then applied to the wire bonded structures and the bond strength exceeded both MIL STD 883 and the maximum output of the force gauge (15gf).
Christian Zorman (Advisor)
Francis Merat (Committee Member)
Phillip Feng (Committee Member)
141 p.
Electrical Engineering
Wire bonding; pull testing; DOE; dynamic polymer

Recommended Citations

Citations

  • Barnes, A. C. (2011). Development of a Wire Bonding Process for Microsystems Fabricated From Polyvinyl Acetate - Nanocomposite [Master's thesis, Case Western Reserve University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=case1302118642

    APA Style (7th edition)

  • Barnes, Andrew. Development of a Wire Bonding Process for Microsystems Fabricated From Polyvinyl Acetate - Nanocomposite. 2011. Case Western Reserve University, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=case1302118642.

    MLA Style (8th edition)

  • Barnes, Andrew. "Development of a Wire Bonding Process for Microsystems Fabricated From Polyvinyl Acetate - Nanocomposite." Master's thesis, Case Western Reserve University, 2011. http://rave.ohiolink.edu/etdc/view?acc_num=case1302118642

    Chicago Manual of Style (17th edition)

case1302118642
1,115
© 2011, some rights reserved.Creative Commons License Development of a Wire Bonding Process for Microsystems Fabricated From Polyvinyl Acetate - Nanocomposite by Andrew Charles Barnes is licensed under a Creative Commons Attribution-NonCommercial-NoDerivs 3.0 Unported License. Based on a work at etd.ohiolink.edu.
This open access ETD is published by Case Western Reserve University School of Graduate Studies and OhioLINK.