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Long-Term, High Temperature Mechanical Stability of PECVD Amorphous Silicon Carbide for Use as Structural Material in Harsh Environment MEMS

LaBarbera, Michael Anthony

Abstract Details

2014, Master of Sciences (Engineering), Case Western Reserve University, EECS - Electrical Engineering.
The development of high temperature, harsh environment sensors is critical to NASA’s mission to investigate planets such as Venus, with its extreme surface temperature and pressures. Silicon carbide (SiC) is an established material that exhibits mechanical robustness and chemical inertness, making it well-suited for use in harsh environments. Devices have been demonstrated using both crystalline and polycrystalline SiC, but are limited by high film deposition temperatures to nonmetalized devices. Amorphous Silicon Carbide (a-SiC) microelectromechanical systems (MEMS) can be deposited at lower temperatures using Plasma-Enhanced Chemical Vapor Deposition (PECVD) and is compatible with metalized devices, making it attractive for use as a structural material for electromechanical systems. However, its mechanical properties and long-term stability at high temperatures are not well understood. This work examines the effect of various deposition parameters on a-SiC thin film mechanical stability at 500°C and incorporates the most promising film into a microfabricated radiofrequency MEMS switch capable of operation at 500°C.
Christian Zorman (Advisor)
Philip Feng (Committee Member)
Francis Merat (Committee Member)
108 p.

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Citations

  • LaBarbera, M. A. (2014). Long-Term, High Temperature Mechanical Stability of PECVD Amorphous Silicon Carbide for Use as Structural Material in Harsh Environment MEMS [Master's thesis, Case Western Reserve University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=case1396456649

    APA Style (7th edition)

  • LaBarbera, Michael. Long-Term, High Temperature Mechanical Stability of PECVD Amorphous Silicon Carbide for Use as Structural Material in Harsh Environment MEMS. 2014. Case Western Reserve University, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=case1396456649.

    MLA Style (8th edition)

  • LaBarbera, Michael. "Long-Term, High Temperature Mechanical Stability of PECVD Amorphous Silicon Carbide for Use as Structural Material in Harsh Environment MEMS." Master's thesis, Case Western Reserve University, 2014. http://rave.ohiolink.edu/etdc/view?acc_num=case1396456649

    Chicago Manual of Style (17th edition)