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Modeling and Feedback Control of a MEMS Electrostatic Actuator

Edwards, Jason
http://rave.ohiolink.edu/etdc/view?acc_num=csu1247583924

Abstract Details

2009, Master of Science in Electrical Engineering, Cleveland State University, Fenn College of Engineering.
This thesis describes the mathematical modeling and closed-loop voltage control of a MEMS electrostatic actuator. The control goal is to extend the travel range of the actuator beyond the open-loop pull-in limit of one third of the initial gap. Three controller designs are presented to reach the control goal. The first controller design utilizes a regular fourth order Active Disturbance Rejection Controller (ADRC) and is able to achieve 97% of the maximum travel range. The second design also uses a fourth order ADRC, while additional modeling information is included in an Extended State Observer (ESO), which is part of the ADRC, to improve control performance. This controller achieved 99% of the travel range. The third design is a multi-loop controller with a second order ADRC in an inner loop and a Proportional-Integral (PI) controller in an outer loop. This design achieved 100% of the travel range. Transfer function representations of the three controller designs are developed. The controllers are successfully applied and simulated in a parallel-plate electrostatic actuator model. The simulation results and frequency domain analyses verified the effectiveness of the controllers in extending the travel range of the actuator and in noise attenuation.
Lili Dong, PhD (Advisor)
Zhiqiang Gao, PhD (Committee Chair)
Dan Simon, PhD (Committee Chair)
200 p.
Engineering
MEMS; electrostatic actuator; feedback control;

Recommended Citations

Citations

  • Edwards, J. (2009). Modeling and Feedback Control of a MEMS Electrostatic Actuator [Master's thesis, Cleveland State University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=csu1247583924

    APA Style (7th edition)

  • Edwards, Jason. Modeling and Feedback Control of a MEMS Electrostatic Actuator. 2009. Cleveland State University, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=csu1247583924.

    MLA Style (8th edition)

  • Edwards, Jason. "Modeling and Feedback Control of a MEMS Electrostatic Actuator." Master's thesis, Cleveland State University, 2009. http://rave.ohiolink.edu/etdc/view?acc_num=csu1247583924

    Chicago Manual of Style (17th edition)

csu1247583924
7,043
© 2008, all rights reserved.
This open access ETD is published by Cleveland State University and OhioLINK.