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The Growth of Columnar Thin Films and Their Characterization Within the Visible and Near Infrared Spectral Bands

Booso, Benjamin David
http://rave.ohiolink.edu/etdc/view?acc_num=dayton1272587327

Abstract Details

2010, Master of Science (M.S.), University of Dayton, Electro-Optics.
Seven series of thin films encompassing metallic, dielectric, and semiconductor materials were deposited onto a substrate by means of electron-beam evaporation. Tilting the substrate at an oblique angle relative to the evaporant source causes an atomic shadowing effect to occur at adjacent deposition locations and results in the growth of a columnar morphology. Scanning electron micrographs for each series validate a film structure and porosity that varies with substrate tilt angle. Angle resolved spectroscopic ellipsometry reveals the anisotropic nature of the different series and determines the optical properties utilizing a best model fit calculation. In some instances, the optical properties of the columnar thin film and its bulk material differ significantly.
Andrew Sarangan, PhD (Advisor)
Joseph Haus, PhD (Committee Member)
Qiwen Zhan, PhD (Committee Member)
183 p.
Aerospace Materials; Automotive Materials; Engineering; Materials Science; Optics; Physics
columnar thin films; electron beam evaporation; oblique angle deposition; spectroscopic ellipsometry; Mueller matrix; index of refraction; extinction coefficient; scanning electron microscope

Recommended Citations

Citations

  • Booso, B. D. (2010). The Growth of Columnar Thin Films and Their Characterization Within the Visible and Near Infrared Spectral Bands [Master's thesis, University of Dayton]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=dayton1272587327

    APA Style (7th edition)

  • Booso, Benjamin. The Growth of Columnar Thin Films and Their Characterization Within the Visible and Near Infrared Spectral Bands. 2010. University of Dayton, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=dayton1272587327.

    MLA Style (8th edition)

  • Booso, Benjamin. "The Growth of Columnar Thin Films and Their Characterization Within the Visible and Near Infrared Spectral Bands." Master's thesis, University of Dayton, 2010. http://rave.ohiolink.edu/etdc/view?acc_num=dayton1272587327

    Chicago Manual of Style (17th edition)

dayton1272587327
526
© 2010, all rights reserved.
This open access ETD is published by University of Dayton and OhioLINK.