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Growth, Optimization, and Characterization of Transition Metal Nitrides and Transition Metal Oxides for Electronic and Optical Applications

Biegler, Zachary J.
http://orcid.org/0000-0002-0749-2031
http://rave.ohiolink.edu/etdc/view?acc_num=dayton1574016211227215

Abstract Details

2019, Master of Science (M.S.), University of Dayton, Electro-Optics.
The next generation of electronic and optical devices require high quality, crystalline materials in order to obtain relevant properties for novel devices. Two classes of materials offer unique material properties that can satisfy the requirements for next generation devices. These two classes of materials are the transition metal nitrides (TMNs) and transition metal oxides (TMOs). These materials offer electronic properties that range from conductive, metallic, materials to semiconducting and insulating materials. However, for many optical and electronic applications, the band structure and crystalline symmetries must be preserved. This work examines the growth and characterization of the TMN materials AlN and ScN as well as the TMO materials VO2 and TiO2. In all these materials, the crystalline structure plays and extremely important role in the desired properties. In addition, incorporation of other impurities can detrimentally impact the functionality of these film materials. In order to minimize the impurity incorporation and maintain the crystalline structure, the growth of AlN, ScN, VO2, and TiO2 films by various deposition techniques were examined and optimized. This allowed growth of high quality TMN and TMO materials that resulted in characterization and optimization of the relevant optical, electronic, and structural properties and, somewhat, the degree to which these properties could be tuned through growth conditions.
Andrew Sarangan, PhD (Advisor)
Amber Reed, PhD (Committee Member)
Partha Banerjee, PhD (Committee Member)
173 p.
Engineering; Materials Science; Optics
Transition Metal Oxides; Transition Metal Nitrides; Unbalanced Magnetron Sputtering; Thin Film Characterization; Physical Vapor Deposition; Optical Thin Films

Recommended Citations

Citations

  • Biegler, Z. J. (2019). Growth, Optimization, and Characterization of Transition Metal Nitrides and Transition Metal Oxides for Electronic and Optical Applications [Master's thesis, University of Dayton]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=dayton1574016211227215

    APA Style (7th edition)

  • Biegler, Zachary. Growth, Optimization, and Characterization of Transition Metal Nitrides and Transition Metal Oxides for Electronic and Optical Applications. 2019. University of Dayton, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=dayton1574016211227215.

    MLA Style (8th edition)

  • Biegler, Zachary. "Growth, Optimization, and Characterization of Transition Metal Nitrides and Transition Metal Oxides for Electronic and Optical Applications." Master's thesis, University of Dayton, 2019. http://rave.ohiolink.edu/etdc/view?acc_num=dayton1574016211227215

    Chicago Manual of Style (17th edition)

dayton1574016211227215
213
© 2019, all rights reserved.
This open access ETD is published by University of Dayton and OhioLINK.