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Design and Fabrication of Suspended Waveguides With Photonic Grating Structures

Lombardo, David
http://rave.ohiolink.edu/etdc/view?acc_num=dayton1591796311145344

Abstract Details

2020, Doctor of Philosophy (Ph.D.), University of Dayton, Electro-Optics.
In this dissertation a fabrication process is developed to reliably create suspended waveguides with optical grating features. Two potential applications for suspended waveguides with optical gratings are described, evanescent field sensors and stimulated Brillouin scattering lasers, along with procedures for design and fabrication of the devices. Development the of fabrication process is described in detail, to explain each choice of material and fabrication method. The optimized fabrication process is presented along with the full parameters and fabrication techniques used. Suspended optical gratings are fabricated successfully using this method, reliably creating suspensions of up to 1mm in length, ranging from 1μm to 5μm in width, and 400-450nm thick. The waveguides are optically characterized, revealing significant spectral features as a result of optically induced defects on the waveguides. These defects and their effects are thoroughly characterized through numerical modeling. Two methods to bypass the issues caused by these defects are presented: increased lithography resolution to create single mode or defect free waveguides, or the use of a high index cladding layer to force even large scale waveguides into single mode operation. Time resolved transmission measurements, using the defects to create stochastic spectral features, are completed as a proof of concept for these structures use as evanescent field sensors.
Andrew Sarangan, Ph.D. (Committee Chair)
Imad Agha, Ph.D. (Committee Member)
Augustine Urbas, Ph.D. (Committee Member)
Jay Mathews, Ph.D. (Committee Member)
187 p.
Engineering; Materials Science; Nanotechnology; Optics
nanofabrication; waveguides; photonics,brillouin; SBS; waveguide design; evanescent field sensor; evanescent; fabrication; nano; optical waveguide; optics; suspended waveguide; suspension; MEMS; CMOS; subwavelength;

Recommended Citations

Citations

  • Lombardo, D. (2020). Design and Fabrication of Suspended Waveguides With Photonic Grating Structures [Doctoral dissertation, University of Dayton]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=dayton1591796311145344

    APA Style (7th edition)

  • Lombardo, David. Design and Fabrication of Suspended Waveguides With Photonic Grating Structures. 2020. University of Dayton, Doctoral dissertation. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=dayton1591796311145344.

    MLA Style (8th edition)

  • Lombardo, David. "Design and Fabrication of Suspended Waveguides With Photonic Grating Structures." Doctoral dissertation, University of Dayton, 2020. http://rave.ohiolink.edu/etdc/view?acc_num=dayton1591796311145344

    Chicago Manual of Style (17th edition)

dayton1591796311145344
245
© 2020, some rights reserved.Creative Commons License Design and Fabrication of Suspended Waveguides With Photonic Grating Structures by David Lombardo is licensed under a Creative Commons Attribution-NonCommercial-ShareAlike 3.0 Unported License. Based on a work at etd.ohiolink.edu.
This open access ETD is published by University of Dayton and OhioLINK.