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Uniformity of VO2 Phase Change Material (PCM) Thin Films Produced by Thermal Oxidation of Vanadium

Zhang, Haixin
http://orcid.org/0000-0002-1025-1191
http://rave.ohiolink.edu/etdc/view?acc_num=dayton162125573238112

Abstract Details

2021, Master of Science (M.S.), University of Dayton, Materials Engineering.
VO2 is a type of phase change material (PCM) that can switch between a metallic state and a semiconducting state at a temperature of around 68 °C. This produces a large change in electrical resistance (almost three orders of magnitude) and large optical changes. Since this phase change occurs close to room temperature, VO2 has a large number of potential applications, such as thermally activated switches, optical modulators and optical limiters. Due to the multiple oxidation states of vanadium, VO2 thin films are typically difficult to produce. Traditionally, they are produced by reactive physical vapor deposition on heated substrates. In our research group, we have developed a different method where VO2 thin films are fabricated by thermal oxidation of PVD-deposited metallic vanadium films. Due to the high reactivity of vanadium, even small changes in the oxidation conditions will result in significant variations in the oxide films. In this thesis, we have examined the uniformity of VO2 films using stylus profiling, SEM, and 4-point probe measurements. The thickness expansion of the films due to oxidation was calculated and verified against experimental data. We also characterized the temperature profile inside the oxidation furnace. In addition, following an approach similar to the thermal oxidation of silicon, a vanadium oxidation model combining multiple oxidation states has been proposed and developed.
Andrew Sarangan, Ph.D., M.A., P.E. (Advisor)
Terrence Murray, Ph.D. (Committee Member)
Christopher Muratore, Ph.D. (Committee Member)
Robert Wilkens, Ph.D., P.E. (Other)
Eddy Rojas, Ph.D., M.A., P.E. (Other)
58 p.
Engineering; Materials Science; Optics
phase change materials; thin films; VO2; thermal oxidation; uniformity measurement; vanadium oxidation model

Recommended Citations

Citations

  • Zhang, H. (2021). Uniformity of VO2 Phase Change Material (PCM) Thin Films Produced by Thermal Oxidation of Vanadium [Master's thesis, University of Dayton]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=dayton162125573238112

    APA Style (7th edition)

  • Zhang, Haixin. Uniformity of VO2 Phase Change Material (PCM) Thin Films Produced by Thermal Oxidation of Vanadium. 2021. University of Dayton, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=dayton162125573238112.

    MLA Style (8th edition)

  • Zhang, Haixin. "Uniformity of VO2 Phase Change Material (PCM) Thin Films Produced by Thermal Oxidation of Vanadium." Master's thesis, University of Dayton, 2021. http://rave.ohiolink.edu/etdc/view?acc_num=dayton162125573238112

    Chicago Manual of Style (17th edition)

dayton162125573238112
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This open access ETD is published by University of Dayton and OhioLINK.