Skip to Main Content
 

Global Search Box

 
 
 

ETD Abstract Container

Abstract Header

Measurement of Thermo-Mechanical Properties of Co-Sputtered SiO2-Ta2O5 Thin Films

Lankford, Maggie E.
http://rave.ohiolink.edu/etdc/view?acc_num=dayton1627653071556618

Abstract Details

2021, Master of Science (M.S.), University of Dayton, Electro-Optics.
The durability of thin film optical interference filters, integrated in systems ranging from imaging sensors to energy-efficient IR-blocking windows, is affected by its stress. The purpose of this work is to explore the thermal stress in thin films, the result of a contrast in the coefficient of thermal expansion (CTE) between the substrate and the film. While much research is focused on thin film intrinsic stress, thermal stress should also be considered for systems designed for high temperature variability and for systems where the film and substrate material properties vary greatly. This work characterizes the coefficient of thermal expansion and the Young's Modulus of SiO2 and Ta2O5 films, common low and high-index optical materials, along with composite SiO2-Ta2O5 thin films grown by reactive co-sputtering. A model for the variation of the CTE as a function of film composition is proposed, showing general agreement with the measured data. Characterization of the thermal stress in the film-substrate system is measured using a custom-built instrument, and the Young's Modulus is verified using nano-indentation. A method for evaluating the instrument noise, and its effect on the precision of the calculated CTE and Modulus values is characterized for this instrument. A model is proposed to enhance future designs-of-experiment using this instrument.
Andrew Sarangan (Advisor)
Christopher Muratore (Committee Member)
Jonathan Vernon (Committee Member)
Lirong Sun (Committee Member)
Materials Science; Optics
Thin Film; SiO2; Ta2O5; Thermal Stress; Youngs Modulus; Coefficient of Thermal Expansion

Recommended Citations

Citations

  • Lankford, M. E. (2021). Measurement of Thermo-Mechanical Properties of Co-Sputtered SiO2-Ta2O5 Thin Films [Master's thesis, University of Dayton]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=dayton1627653071556618

    APA Style (7th edition)

  • Lankford, Maggie. Measurement of Thermo-Mechanical Properties of Co-Sputtered SiO2-Ta2O5 Thin Films . 2021. University of Dayton, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=dayton1627653071556618.

    MLA Style (8th edition)

  • Lankford, Maggie. "Measurement of Thermo-Mechanical Properties of Co-Sputtered SiO2-Ta2O5 Thin Films ." Master's thesis, University of Dayton, 2021. http://rave.ohiolink.edu/etdc/view?acc_num=dayton1627653071556618

    Chicago Manual of Style (17th edition)

dayton1627653071556618
700
© 2021, all rights reserved.
This open access ETD is published by University of Dayton and OhioLINK.