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Full text release has been delayed at the author's request until May 06, 2025
ETD Abstract Container
Abstract Header
Microwave Assisted Chemical Etching of β-Ga2O3
Author Info
Sowers, Elizabeth Ann
ORCID® Identifier
http://orcid.org/0000-0001-9945-7526
Permalink:
http://rave.ohiolink.edu/etdc/view?acc_num=dayton1681820771230061
Abstract Details
Year and Degree
2023, Master of Science (M.S.), University of Dayton, Chemistry.
Abstract
Beta-gallium oxide (BGO) has gained attention in recent years because of its known ultra-wide bandgap, high breakdown electric field, and appropriate mobility, which makes it a promising semiconductor for high-efficiency device applications. In the fabrication process, etching is a critical step in device completion and performance. BGO is widely known to be difficult to etch, due to the strength of its ionic bonds. This difficulty limits the reagents that can etch BGO, which can lead to surface damage and low-aspect ratio architecture. A better etching technique is needed to increase device performance for this semiconductor material. We prove that BGO can be etched without plasma assistance and without the introduction of HF using microwave chemistry. Samples were characterized via atomic force microscopy (AFM) and energy dispersive X-ray spectrometry (EDS).
Committee
Judit Beagle (Advisor)
Andrew Green (Committee Member)
Shawn Swavey (Committee Member)
Pages
123 p.
Subject Headings
Chemistry
;
Materials Science
Keywords
Gallium oxide, etching, microwave etching, ionic liquid, BGO
Recommended Citations
Refworks
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RIS
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Citations
Sowers, E. A. (2023).
Microwave Assisted Chemical Etching of β-Ga2O3
[Master's thesis, University of Dayton]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=dayton1681820771230061
APA Style (7th edition)
Sowers, Elizabeth.
Microwave Assisted Chemical Etching of β-Ga2O3.
2023. University of Dayton, Master's thesis.
OhioLINK Electronic Theses and Dissertations Center
, http://rave.ohiolink.edu/etdc/view?acc_num=dayton1681820771230061.
MLA Style (8th edition)
Sowers, Elizabeth. "Microwave Assisted Chemical Etching of β-Ga2O3." Master's thesis, University of Dayton, 2023. http://rave.ohiolink.edu/etdc/view?acc_num=dayton1681820771230061
Chicago Manual of Style (17th edition)
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Document number:
dayton1681820771230061
Copyright Info
© 2023, all rights reserved.
This open access ETD is published by University of Dayton and OhioLINK.