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Silicon carbide coatings by plasma-enhanced chemical vapor deposition on silicon and polyimide substrates

Chakravarthy, Pramod
http://rave.ohiolink.edu/etdc/view?acc_num=ohiou1179519920

Abstract Details

1995, Master of Science (MS), Ohio University, Chemical Engineering (Engineering).

Silicon carbide coatings by plasma-enhanced chemical vapor deposition on silicon and polyimide substrates

Daniel Gulino (Advisor)
103 p.
Engineering, Chemical
Silicon Carbide Coatings; Polyimide Substrates; Plasma-Enhanced Chemical

Recommended Citations

Citations

  • Chakravarthy, P. (1995). Silicon carbide coatings by plasma-enhanced chemical vapor deposition on silicon and polyimide substrates [Master's thesis, Ohio University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=ohiou1179519920

    APA Style (7th edition)

  • Chakravarthy, Pramod. Silicon carbide coatings by plasma-enhanced chemical vapor deposition on silicon and polyimide substrates. 1995. Ohio University, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=ohiou1179519920.

    MLA Style (8th edition)

  • Chakravarthy, Pramod. "Silicon carbide coatings by plasma-enhanced chemical vapor deposition on silicon and polyimide substrates." Master's thesis, Ohio University, 1995. http://rave.ohiolink.edu/etdc/view?acc_num=ohiou1179519920

    Chicago Manual of Style (17th edition)

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© 1995, all rights reserved.
This open access ETD is published by Ohio University and OhioLINK.