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Tolerance and Materials Design of Nanophotonic Amorphous Membranes for Broadband Chemical Sensing

Abbey, Sonja P.

Abstract Details

2012, Master of Science (MS), Ohio University, Electrical Engineering (Engineering and Technology).
Very few if any gaseous chemical sensors are highly sensitive, highly selective, applicable for sensing multiple chemicals, and allow for broad spectrum detection. There is a need for more sensitive, selective, and reliable chemical sensors in the market today. This thesis focuses on the materials and tolerance design of thin film Low Optical Overlapping Mode (LOOM) waveguides. Ellipsometry, atomic force microscopy, and xray diffraction tools are used to measure characteristics important to materials choice and design. RF magnetron sputtering and atomic layer deposition tools are evaluated and compared as options for thin film deposition. Through the use of FemSIM¿¿¿¿¿¿¿ modeling software, tolerance values for membrane and rib thickness, membrane to rib ratio, and refractive index of the wave guiding material are defined. Additionally the broad spectrum capability of the waveguide is defined.
Ralph D. Whaley, Jr. (Advisor)
94 p.

Recommended Citations

Citations

  • Abbey, S. P. (2012). Tolerance and Materials Design of Nanophotonic Amorphous Membranes for Broadband Chemical Sensing [Master's thesis, Ohio University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=ohiou1344311156

    APA Style (7th edition)

  • Abbey, Sonja. Tolerance and Materials Design of Nanophotonic Amorphous Membranes for Broadband Chemical Sensing. 2012. Ohio University, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=ohiou1344311156.

    MLA Style (8th edition)

  • Abbey, Sonja. "Tolerance and Materials Design of Nanophotonic Amorphous Membranes for Broadband Chemical Sensing." Master's thesis, Ohio University, 2012. http://rave.ohiolink.edu/etdc/view?acc_num=ohiou1344311156

    Chicago Manual of Style (17th edition)