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Science and applications of III-V graded anion metamorphic buffers on INP substrates

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2007, Doctor of Philosophy, Ohio State University, Electrical Engineering.
Anion-based InAsP metamorphic step-graded buffers are a novel solution to the lattice-mismatch problem of devices with the lattice constant between InP and InAs grown on InP substrates. Compared to mixed-cation step-graded buffers, recent work shows InAsP step-graded buffers have achieved smoother surface morphology and lower threading dislocation density. The focus of this dissertation will be to investigate the fundamental growth science of InAsP metamorphic step-graded buffers using solid source molecular beam epitaxy. The structural and electronic properties of InAsP step-graded buffers will be explored by various characterization approaches, including high resolution X-ray diffraction, electron microscopy, Hall measurements, etc. and compared to those of mixed-cation step-graded buffers. Based on the characterization results, the buffer design of InAsP step-graded buffers will be optimized, aiming to achieve high-quality material for device applications. This research is expected to provide a further understanding of the growth, material properties and device application of InAsP metamorphic step-graded buffers.
Steven Ringel (Advisor)
211 p.

Recommended Citations

Citations

  • Lin, Y. (2007). Science and applications of III-V graded anion metamorphic buffers on INP substrates [Doctoral dissertation, Ohio State University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=osu1172852334

    APA Style (7th edition)

  • Lin, Yong. Science and applications of III-V graded anion metamorphic buffers on INP substrates. 2007. Ohio State University, Doctoral dissertation. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=osu1172852334.

    MLA Style (8th edition)

  • Lin, Yong. "Science and applications of III-V graded anion metamorphic buffers on INP substrates." Doctoral dissertation, Ohio State University, 2007. http://rave.ohiolink.edu/etdc/view?acc_num=osu1172852334

    Chicago Manual of Style (17th edition)