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Investigation of the Optical Effects of Single Point Diamond Machined Surfaces and the Applications of Micro Machining

Li, Lei
http://rave.ohiolink.edu/etdc/view?acc_num=osu1252435737

Abstract Details

2009, Doctor of Philosophy, Ohio State University, Industrial and Systems Engineering.
The ultraprecision Single Point Diamond Turning (SPDT) technology has been developed for over 40 years and has been successfully applied to numerous fields. At present, the ultraprecision single point diamond turning technology already expanded to Single Point Diamond Machining (SPDM) technology, which includes several related processes in addition to the more conventional single point diamond turning. The other related processes are Fast Tool Servo (FTS), Slow Tool Servo (STS), broaching, and fly cutting.Though this technology has many notable merits, for example it can achieve micro meter or even sub micron form accuracy and nano meter surface roughness, there still has some drawbacks. One of the objectives of this research is to investigate one of these drawbacks, the diffraction and scattering of the ultraprecision single point diamond machined surfaces. Another objective is to extend the application of the SPDM by developing new design and new machining processes for freeform micro devices used in optical, mechanical, electronic, and biomedical fields. The mechanism and model of the ultraprecision single point diamond turning and micro cutting were first reviewed and discussed. The related subjects to the SPDT and micro cutting were also involved. The optical effects of diamond machined surfaces were studied. The diffraction and scattering generated from the diamond machined surfaces was analytically and experimentally studied. The influences from machining parameters, such as tool mark spacing, feedrate, spindle speed, tool radius, tool condition and different diamond machining process were considered. An empirical relationship between the machining conditions and the first order diffraction from the diamond machined surfaces was setup. This model can be used to select optimal machining conditions for diamond machining process. The design, machining and testing of microlens arrays by using SPDM process were introduced. Two microlens array examples were given. One is a 5 by 5 matrix arranged concave microlens array on flat brass substrate. The other one is a circular arranged 3D microlens array, which has 341 plano-convex micro lenslets, on a thin spherical PMMA substrate. Using the fabricated 3D microlens array, a 3D micro projection system was developed. The formed micro pattern dimension was 340 um by 460 um, giving an overall projection ratio of 34:1. It has been demonstrated that a low cost and simple manufacturing process for true 3D micro scale structures on non-planar substrates based on microlenses can be realized. Last but not least, an affordable polymer SAR micromixer was developed based on a high accuracy, low cost, and flexible micro machining process. Specifically both the mixing performance and the fabrication process were carefully studied. An improved design of the SAR micromixer was also given, the mixing efficiency of the two designs were 0.11 and 0.065 respectively.
Allen. Y. Yi, PhD (Advisor)
Jose. M. Castro, PhD (Committee Member)
L. James Lee, PhD (Committee Member)
191 p.
Industrial Engineering; Mechanical Engineering
single point diamond turning; slow tool servo; ultraprecision machining; micro machining; microlens array; micromixer

Recommended Citations

Citations

  • Li, L. (2009). Investigation of the Optical Effects of Single Point Diamond Machined Surfaces and the Applications of Micro Machining [Doctoral dissertation, Ohio State University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=osu1252435737

    APA Style (7th edition)

  • Li, Lei. Investigation of the Optical Effects of Single Point Diamond Machined Surfaces and the Applications of Micro Machining. 2009. Ohio State University, Doctoral dissertation. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=osu1252435737.

    MLA Style (8th edition)

  • Li, Lei. "Investigation of the Optical Effects of Single Point Diamond Machined Surfaces and the Applications of Micro Machining." Doctoral dissertation, Ohio State University, 2009. http://rave.ohiolink.edu/etdc/view?acc_num=osu1252435737

    Chicago Manual of Style (17th edition)

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This open access ETD is published by The Ohio State University and OhioLINK.