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Emre Cinkilic_MS Thesis_Submitted.pdf (1.46 MB)

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Comparison of Interface State Spectroscopy Techniques by Characterizing Dielectric – InGaAs Interfaces

Cinkilic, Emre
http://rave.ohiolink.edu/etdc/view?acc_num=osu1366329582

Abstract Details

2013, Master of Science, Ohio State University, Electrical and Computer Engineering.
Highly scaled III-V compound semiconductors, particularly n-In0,53Ga0,47As in conjunction with a suitable high-¿ dielectric, has been regarded as a promising channel material for high performance metal-oxide-semiconductor field effect transistors (MOSFETs). The high intrinsic electron mobility and small band gap of n-In0,53Ga0,47As offers the possibility of developing MOSFETs with higher drive currents at low operation voltages. However, the high density of interface states (Dit) at the high-¿/n-In0,53Ga0,47As interface degrades the device performance. Therefore, accurate and quantitative characterization of the interface states is an important issue in the continued development of high quality interfaces to track changes induced by processing and growth optimization. This work demonstrates that high Dit concentrations from high-¿/semiconductor interfaces can be accurately characterized using constant capacitance deep level transient spectroscopy and low temperature C-V (LTCV) method. This is compared with the conductance method, which underestimates Dit magnitude and shows energy dependent distribution.
Steven Ringel (Advisor)
Siddharth Rajan (Committee Member)
98 p.
Electrical Engineering
High-k/III-V interfaces; CC-DLTS; Conductance Method; Atomic layer deposition

Recommended Citations

Citations

  • Cinkilic, E. (2013). Comparison of Interface State Spectroscopy Techniques by Characterizing Dielectric – InGaAs Interfaces [Master's thesis, Ohio State University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=osu1366329582

    APA Style (7th edition)

  • Cinkilic, Emre. Comparison of Interface State Spectroscopy Techniques by Characterizing Dielectric – InGaAs Interfaces . 2013. Ohio State University, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=osu1366329582.

    MLA Style (8th edition)

  • Cinkilic, Emre. "Comparison of Interface State Spectroscopy Techniques by Characterizing Dielectric – InGaAs Interfaces ." Master's thesis, Ohio State University, 2013. http://rave.ohiolink.edu/etdc/view?acc_num=osu1366329582

    Chicago Manual of Style (17th edition)

osu1366329582
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© 2013, all rights reserved.
This open access ETD is published by The Ohio State University and OhioLINK.