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Modeling and Analysis of Compliant Mechanisms for Designing Nanopositioners

Shi, Hongliang
http://rave.ohiolink.edu/etdc/view?acc_num=osu1385484917

Abstract Details

2013, Doctor of Philosophy, Ohio State University, Mechanical Engineering.
The research goal of this thesis is to develop new models and computational tools for the design and optimization of compliant mechanisms with the applications to nanopositioners. A nanopositioner is a high precision positioning device used to manipulate an object to a target position at a nanometer resolution. Due to the high precision control of motion, nanopositioners are widely used in industrial and research applications which require super resolution, such as microscopy, nanofabrication, nanopatterning and interfermometry. The design tools of nanopositioners can speed up computation, increase modeling accuracy, and hence improve quality of the designs. Ultimately they facilitate design engineers to produce high performance nanopositioners effectively by shortening the design cycle. Despite the current methods, it is still difficult to accurately and efficiently analyze and model nanopositioners, since the modeling involves nonlinear geometries, nonintuitive design and multiphysics. In this research, we developed novel methods that are based on screw theory and compliance matrix for modeling and design of nanopositioners. In results, we have generated a symbolic formulation for analytical compliance analysis of flexure mechanisms. Based on this formulation, we derived a kinematic model for actuation and control of a MEMS hexapod nanopositioner. Moreover, we created an analytical model for calculating the workspace of a meso-scale flexure-based hexapod nanopositioner. And based on the workspace calculation, we apply genetic algorithm to conduct the optimization of the MEMS hexapod nanopostioner to obtain a large worksapce. Finally, we derived the Jacobian matrix based kinematic model and calibrated the meso-scale hexapod nanopositioner.
Hai-jun Su (Advisor)
Mo-How Shen (Committee Member)
Rebecca Dupaix (Committee Member)
Manoj Srinivasan (Committee Member)
167 p.
Mechanical Engineering
nanopositioners, mechanical design, structural analysis, kinematics and dynamics, control and actuation, calibration, optimization, stiffness analysis, workspace, MEMS, flexure, compliant mechanism, robotics

Recommended Citations

Citations

  • Shi, H. (2013). Modeling and Analysis of Compliant Mechanisms for Designing Nanopositioners [Doctoral dissertation, Ohio State University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=osu1385484917

    APA Style (7th edition)

  • Shi, Hongliang. Modeling and Analysis of Compliant Mechanisms for Designing Nanopositioners. 2013. Ohio State University, Doctoral dissertation. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=osu1385484917.

    MLA Style (8th edition)

  • Shi, Hongliang. "Modeling and Analysis of Compliant Mechanisms for Designing Nanopositioners." Doctoral dissertation, Ohio State University, 2013. http://rave.ohiolink.edu/etdc/view?acc_num=osu1385484917

    Chicago Manual of Style (17th edition)

osu1385484917
3,303
© 2013, all rights reserved.
This open access ETD is published by The Ohio State University and OhioLINK.