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Design and Fabrication of a Micro-Machined Free-Floating Membrane on a Flexible Substrate

Sundani, Harsh
http://rave.ohiolink.edu/etdc/view?acc_num=toledo1279314172

Abstract Details

2010, Master of Science, University of Toledo, Electrical Engineering.
A MEMS device might function perfectly well in the controlled environment in which it has been created. However, the device can be a real viable product only after it has been packaged with proven performance in a package. As such, the assembly yield of a MEMS package is often a challenging target to meet. This thesis is focused on the design and fabrication of a free-floating membrane on a flexible substrate to enable easy and cost effective packaging of MEMS devices. The advantages of this configuration are twofold. First, MEMS devices are fabricated on the flexible film while it is still bonded to the Si substrate, which provides mechanical support. Secondly, a grid pattern of membranes is surrounded by Si support structures, thus allowing the flexible circuit to be held flat by vacuum during various processing steps. Since standard MEMS fabrication processes are designed for rigid substrates, several process modifications were required to handle flexible substrates. The adaptation of each fabrication process has been documented. Furthermore, detailed information regarding the selection of compatible materials, as well as incompatibilities that were encountered, has been presented to aid future researchers in developing flexible MEMS processes.
VIjay Devabhaktuni (Committee Chair)
Christopher Melkonian (Committee Member)
Mansoor Alam (Committee Member)
Rashmi Jha (Committee Member)
Electrical Engineering; Materials Science; Mechanical Engineering
Kapton; PDMS; flexible; membrane; free-floating; fabrication; design

Recommended Citations

Citations

  • Sundani, H. (2010). Design and Fabrication of a Micro-Machined Free-Floating Membrane on a Flexible Substrate [Master's thesis, University of Toledo]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=toledo1279314172

    APA Style (7th edition)

  • Sundani, Harsh. Design and Fabrication of a Micro-Machined Free-Floating Membrane on a Flexible Substrate. 2010. University of Toledo, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=toledo1279314172.

    MLA Style (8th edition)

  • Sundani, Harsh. "Design and Fabrication of a Micro-Machined Free-Floating Membrane on a Flexible Substrate." Master's thesis, University of Toledo, 2010. http://rave.ohiolink.edu/etdc/view?acc_num=toledo1279314172

    Chicago Manual of Style (17th edition)

toledo1279314172
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© 2010, all rights reserved.
This open access ETD is published by University of Toledo and OhioLINK.