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Fabrication of Metal Microstructures by Single-Pulse, Localized Irradiation of Thin Metal Films

Gaddam, Chandra Prakash R.
http://rave.ohiolink.edu/etdc/view?acc_num=toledo1293139971

Abstract Details

2010, Master of Science in Electrical Engineering, University of Toledo, College of Engineering.
This thesis deals with the formation of microbumps and high-aspect-ratio protrusions on gold, copper, titanium, aluminum films as a result of single-pulse localized laser irradiation. A Q-switched nanosecond-pulse laser, emitting at its fourth harmonic of 266nm was the laser source employed and a demagnifying projection optical system was used to produce micrometer-scale circular laser-irradiation spots. Gold, copper, titanium and aluminum films with a thickness of several hundred nanometers were irradiated, under low-vacuum conditions, with circular laser spots that were several micrometers in diameter. The metal films were deposited by RF or DC sputtering from the corresponding metal targets. The resulting structures were imaged via scanning electron microscopy. The formation mechanism of these structures is briefly discussed in view of our results and other, related published work. We studied the conditions for pulsed laser micro structuring of metal films on various substrates, with main focus on determining fluence levels and irradiation geometry parameters in which the formation of various substrates is possible in a reproducible fashion. The laser-deposited heat transfer within the irradiated films was evaluated using the COMSOL finite-elements modeling software, and the resulting temperature profiles are discussed in the context of the experimentally obtained results.
Daniel Georgiev, PhD (Committee Chair)
Anthony Johnson, PhD (Committee Member)
Sorin Cioc, PhD (Committee Member)
93 p.
Electrical Engineering

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Citations

  • Gaddam, C. P. R. (2010). Fabrication of Metal Microstructures by Single-Pulse, Localized Irradiation of Thin Metal Films [Master's thesis, University of Toledo]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=toledo1293139971

    APA Style (7th edition)

  • Gaddam, Chandra Prakash. Fabrication of Metal Microstructures by Single-Pulse, Localized Irradiation of Thin Metal Films. 2010. University of Toledo, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=toledo1293139971.

    MLA Style (8th edition)

  • Gaddam, Chandra Prakash. "Fabrication of Metal Microstructures by Single-Pulse, Localized Irradiation of Thin Metal Films." Master's thesis, University of Toledo, 2010. http://rave.ohiolink.edu/etdc/view?acc_num=toledo1293139971

    Chicago Manual of Style (17th edition)

toledo1293139971
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© 2010, all rights reserved.
This open access ETD is published by University of Toledo and OhioLINK.