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Investigation of MgO/HfO2 stack for Metal-Insulator-Insulator-Metal(MIIM) diode

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2015, Master of Science, University of Toledo, Electrical Engineering.
Single insulator metal conducting diode which is also known as MIM diode has been in use since 1960 because it can achieve rectification in THz frequency ranges. But the expectation of performance keep raising. Rectification after some limit is not possible in MIM diodes because there is a trade-off between conductivity and non-linearity. It all changed with Phiar Corporation invention. They patented a metal insulator-insulator metal diode with high conductivity and high non-linearity simultaneously. The main objective of this research work is designing, fabricating and characterizing the MIIM diode with double insulator layer. All the samples are fabricated using RF Magnetron Sputtering System at The University Of Toledo. The samples were tested inside a Lake Shore Cryogenic TTP4 probe station. Electrical characterization is done using the Keithley 4200 Semiconductor Characterization System(SCS) at The University Of Toledo. TiN/MgO/HfO2/TiN and TiN/MgO/TiN are two samples fabricated to show the impact of single and multi insulator layer on asymmetry and non-linearity. It is found that multi insulator layer has greater asymmetrical I-V curve and non linearity than single insulator I-V curve. Ru/HfO2/MgO/Al is fabricated with different top and bottom electrode with different work functions to get more asymmetrical I-V curve. The conductance level is found to be lower than TiN samples indicating the role of electrodes on asymmetry, I-V curve and overall conductivity.
Rashmi Jha, Dr. (Advisor)
Richard Molyet (Committee Member)

Recommended Citations

Citations

  • Bansal, Y. (2015). Investigation of MgO/HfO2 stack for Metal-Insulator-Insulator-Metal(MIIM) diode [Master's thesis, University of Toledo]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=toledo1430418279

    APA Style (7th edition)

  • Bansal, Yash. Investigation of MgO/HfO2 stack for Metal-Insulator-Insulator-Metal(MIIM) diode. 2015. University of Toledo, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=toledo1430418279.

    MLA Style (8th edition)

  • Bansal, Yash. "Investigation of MgO/HfO2 stack for Metal-Insulator-Insulator-Metal(MIIM) diode." Master's thesis, University of Toledo, 2015. http://rave.ohiolink.edu/etdc/view?acc_num=toledo1430418279

    Chicago Manual of Style (17th edition)