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CloudMEMS Platform for Design and Simulation of MEMS: Physics Modules & End-to-End Testing

Voyantzis, Mitchell D
http://rave.ohiolink.edu/etdc/view?acc_num=toledo1533226484963866

Abstract Details

2018, Master of Science, University of Toledo, Electrical Engineering.
Sensors are playing an ever-increasing role in our daily lives, from portable electronics to our automobiles and health care devices. Micro electro-mechanical systems (MEMS) comprise the foundation of these sensors. MEMS allow for miniaturization and integration and make use of the same batch manufacturing processes as integrated circuits (ICs). Batch manufacturing techniques allow several thousand MEMS to be manufactured at once. In recent years several MEMS manufacturers have begun offering standardized processes and allow multiple designs on one wafer, greatly reducing the cost of prototyping a MEMS design. Current MEMS design suites impose several barriers to their use; high licensing fees, high processing power requirement, and a steep learning curve. Current expert design suites are made for users with a deep understanding of manufacturing processes. Design suites geared towards non-experts typically rely on a design paradigm unfamiliar to most, such as typed netlist or schematic layouts. These paradigms limit what is capable of being designed to a library of predefined devices or building blocks, thus limiting the type of MEMS capable of being designed and stifling innovation. To fully utilize the existing MEMS standardized processes and manufacturing services new design and simulation tools must be developed. These tools must mitigate the manufacturing process knowledge requirement present in existing tools while utilizing a design paradigm that does not limit the type of MEMS capable of being designed. In this thesis a novel web-based platform for MEMS design is presented. This platform makes use of cloud-based processing power and allows for simulation of MEMS whose underlying principle of operation is thermal expansion, electrostatics, or the piezoelectric effect. The platform allows users to create parametric, three-dimensional, parts that incorporate manufacturing constraints and share those parts with other users of the platform. Manufacturing constraints are incorporated into the parametric parts through limits on the part's parameters, and through expressions that relate the part's parameters. To demonstrate the ability to implement design constraints from a standardized MEMS manufacturing process, the proposed platform is used to design the constituent parts of a micro-resonator. It is shown how a user who may lack manufacturing process knowledge can assemble the micro-resonator using the platform. This is done by demonstrating the list of numerical inputs which describe the geometry of the micro-resonator's constituent parts. To evaluate the accuracy of simulations conducted using the platform, a simulation is run on the micro-resonator with the results compared to actual device measurements and analytical predictions.
Daniel Georgiev (Committee Chair)
Vijay Devabhaktuni (Committee Co-Chair)
William Evans (Committee Member)
Raghav Khanna (Committee Member)
126 p.
Computer Science; Electrical Engineering
MEMS; FEA; Cloud; Simulation; Micro; Electromechanical; Systems;

Recommended Citations

Citations

  • Voyantzis, M. D. (2018). CloudMEMS Platform for Design and Simulation of MEMS: Physics Modules & End-to-End Testing [Master's thesis, University of Toledo]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=toledo1533226484963866

    APA Style (7th edition)

  • Voyantzis, Mitchell. CloudMEMS Platform for Design and Simulation of MEMS: Physics Modules & End-to-End Testing. 2018. University of Toledo, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=toledo1533226484963866.

    MLA Style (8th edition)

  • Voyantzis, Mitchell. "CloudMEMS Platform for Design and Simulation of MEMS: Physics Modules & End-to-End Testing." Master's thesis, University of Toledo, 2018. http://rave.ohiolink.edu/etdc/view?acc_num=toledo1533226484963866

    Chicago Manual of Style (17th edition)

toledo1533226484963866
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This open access ETD is published by University of Toledo and OhioLINK.