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CVD Modification and Vapor/Gas Separation Properties of Alumina Membranes

Cooper, Charlie Austin

Abstract Details

2001, MS, University of Cincinnati, Engineering : Chemical Engineering.
Chemical vapor deposition was used to modify 3.6nm pore, sol-gel derived, alpha- alumina membranes supported on macroporous alpha-alumina. Aluminum oxide was deposited in the pores of the alpha-alumina membrane by alternating additions of trimethylaluminum and water. By reducing the pore size, the permeance of non-condensable gasses was reduced much more than the permeance of condensable gasses due to capillary condensation. The modified membrane that exhibited the best separation properties had a water permeance ranging from 1.5x10-6mol/m2 sPa to 3.0x10-7mol/m 2 sPa, an oxygen permeance ranging from 1.7x10-7mol/m2 sPa to 1.5x10-9mol/m2 sPa, and a separation factor as high as 140. The microstructure of the pores was found not to be atomic layer CVD derived as initially thought, but contained some irregularities attributed to homogeneous reactions. GIS p-type zeolite membranes were also made and found to have similar separation properties to the more heavily modified alpha-alumina membranes.
Dr. Jerry Lin (Advisor)
81 p.

Recommended Citations

Citations

  • Cooper, C. A. (2001). CVD Modification and Vapor/Gas Separation Properties of Alumina Membranes [Master's thesis, University of Cincinnati]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1004998070

    APA Style (7th edition)

  • Cooper, Charlie. CVD Modification and Vapor/Gas Separation Properties of Alumina Membranes. 2001. University of Cincinnati, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=ucin1004998070.

    MLA Style (8th edition)

  • Cooper, Charlie. "CVD Modification and Vapor/Gas Separation Properties of Alumina Membranes." Master's thesis, University of Cincinnati, 2001. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1004998070

    Chicago Manual of Style (17th edition)