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MICROMACHINED PERMANENT MAGNETS AND THEIR MEMS APPLICATIONS

CHO, HYOUNG JIN
http://rave.ohiolink.edu/etdc/view?acc_num=ucin1014839747

Abstract Details

2002, PhD, University of Cincinnati, Engineering : Electrical Engineering.
In this research, new micromachined permanent magnets have been proposed, developed and characterized for MEMS applications. In realizing micromachined permanent magnets, a new electroplating technique using external magnetic field and a bumper filling technique using a photolithographically defined mold with resin bonded magnetic particles have been developed. The newly developed micromachining techniques allow thick film-type permanent magnet components to be integrated to magnetic MEMS devices with dimensional control and alignment. Permanent magnet arrays with the dimensions ranging from 30 micrometers to 200 micrometers have been developed with an energy density up to 2.7 kJ/m 3 in precisely defined forms in the micro scale. For the applications of the permanent magnets developed in this work, three novel magnetic MEMS devices such as a bi-directional magnetic actuator, a magnetically driven optical scanner, and a magnetic cell separator have been successfully realized. After design and modeling, each device has been fabricated and fully characterized. The bi-directional actuator with the electroplated permanent magnet array has achieved bi- directional motion clearly and shown good agreement with the analytical and simulated models. The optical scanner has shown linear bi-directional response under static actuation and stable bi-directional scanning performance under dynamic actuation. As a potential BioMEMS application of the developed permanent magnet, the prototype magnetic cell separator using the electroplated permanent magnet strip array has been proposed and demonstrated for magnetic bead patterning. In conclusion, new thick film-type, electroplated CoNiMnP and epoxy resin bonded Sr-ferrite permanent magnets have been developed and characterized, and then, three new magnetic MEMS devices using the permanent magnets such as a bi-directional magnetic actuator, an optical scanner and a magnetic cell separator have been realized in this research. The new micromachined permanent magnets, fabrication techniques and the new devices in this work can be applied to many MEMS devices that demand a constant magnetic field source and large bi-directional actuation, in the areas of light beam, flow and biological cell handling.
Dr. Chong H. Ahn (Advisor)
148 p.
magnetic mems; micromachined magnetic microactuator; micromachined optical scanner; micromachined permanent magnet; bi-directional actuation

Recommended Citations

Citations

  • CHO, H. J. (2002). MICROMACHINED PERMANENT MAGNETS AND THEIR MEMS APPLICATIONS [Doctoral dissertation, University of Cincinnati]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1014839747

    APA Style (7th edition)

  • CHO, HYOUNG JIN. MICROMACHINED PERMANENT MAGNETS AND THEIR MEMS APPLICATIONS. 2002. University of Cincinnati, Doctoral dissertation. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=ucin1014839747.

    MLA Style (8th edition)

  • CHO, HYOUNG JIN. "MICROMACHINED PERMANENT MAGNETS AND THEIR MEMS APPLICATIONS." Doctoral dissertation, University of Cincinnati, 2002. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1014839747

    Chicago Manual of Style (17th edition)

ucin1014839747
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© 2002, all rights reserved.
This open access ETD is published by University of Cincinnati and OhioLINK.