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ucin1023127713.pdf (3.03 MB)
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FOCUSED ION BEAM FABRICATION OF PHOTONIC STRUCTURES FOR OPTICAL COMMUNICATIONS
Author Info
CHENG, JI
Permalink:
http://rave.ohiolink.edu/etdc/view?acc_num=ucin1023127713
Abstract Details
Year and Degree
2002, PhD, University of Cincinnati, Engineering : Electrical Engineering.
Abstract
We have investigated the capability of focused ion beam (FIB) in the microfabrication of photonic devices. Novel liquid metal ion sources (LMIS) for FIB have been developed. With these LMIS, implantation-doping of different ion species into semiconductors for local modification of their electrical and photonic properties has been studied. FIB micromachining of semiconductors has also been investigated. Methods of micromilling of microgratings, photonic band-gap (PBG) structures, micromirrors, microlenses, Bragg type grating structures have been developed. An approach to form microstructures on an arbitrary angled facet has been invented. The application of FIB milling of microgratings has been pioneered, and a prototype of a wavelength-division multiplexing (WDM) demultiplexer utilizing the micrograting and optical fiber technologies has been demonstrated.
Committee
Dr. Andrew Steckl (Advisor)
Pages
141 p.
Keywords
focused ion beam
;
micromachining
;
photonics
;
optical communication
;
diffraction grating
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Citations
CHENG, J. (2002).
FOCUSED ION BEAM FABRICATION OF PHOTONIC STRUCTURES FOR OPTICAL COMMUNICATIONS
[Doctoral dissertation, University of Cincinnati]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1023127713
APA Style (7th edition)
CHENG, JI.
FOCUSED ION BEAM FABRICATION OF PHOTONIC STRUCTURES FOR OPTICAL COMMUNICATIONS.
2002. University of Cincinnati, Doctoral dissertation.
OhioLINK Electronic Theses and Dissertations Center
, http://rave.ohiolink.edu/etdc/view?acc_num=ucin1023127713.
MLA Style (8th edition)
CHENG, JI. "FOCUSED ION BEAM FABRICATION OF PHOTONIC STRUCTURES FOR OPTICAL COMMUNICATIONS." Doctoral dissertation, University of Cincinnati, 2002. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1023127713
Chicago Manual of Style (17th edition)
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Document number:
ucin1023127713
Download Count:
1,492
Copyright Info
© 2002, all rights reserved.
This open access ETD is published by University of Cincinnati and OhioLINK.