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HYBRID X-BAND POWER AMPLIFIER DEVELOPMENT FOR 3D-IC PHASED ARRAY MODULE

XU, PENG
http://rave.ohiolink.edu/etdc/view?acc_num=ucin1049977754

Abstract Details

2003, MS, University of Cincinnati, Engineering : Electrical Engineering.
In this thesis, design, processing and characterization of a hybrid X-band power amplifier is presented for a vertically interconnected multilayer monolithic microwave (M3) module for phased array antenna applications. The module is processed layer by layer as sub-circuits with each subsequent layer monolithically connected to the previous layer by vertical posts. The power amplifier, which occupies the substrate level of the module, can be realized in various alternate ways. In each case, the design incorporates a silicon wafer as a substrate, MEMS processing technology to machine the substrate and polyimide multilayer circuitry with metal layers to complete the bias and matching networks. Micromachining of a silicon wafer provides a means to implement a hybrid power amplifier with a chip transistor embedded in the substrate with matching and bias networks processed in the ensuing upper layers. An application of this technology will provide extension of the SOI technology to higher frequencies and allow mixed analog RF and digital circuitry to be processed on the same substrate. To demonstrate this technology, a hybrid power amplifier was designed using a chip transistor and incorporating multilayer matching networks.
Dr. Altan M. Ferendeci (Advisor)
82 p.
wet bulk silicon etching; PI2611 polyimide multilayer process; MMIC circuit; wire bonding; on water microwave measurement

Recommended Citations

Citations

  • XU, P. (2003). HYBRID X-BAND POWER AMPLIFIER DEVELOPMENT FOR 3D-IC PHASED ARRAY MODULE [Master's thesis, University of Cincinnati]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1049977754

    APA Style (7th edition)

  • XU, PENG. HYBRID X-BAND POWER AMPLIFIER DEVELOPMENT FOR 3D-IC PHASED ARRAY MODULE. 2003. University of Cincinnati, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=ucin1049977754.

    MLA Style (8th edition)

  • XU, PENG. "HYBRID X-BAND POWER AMPLIFIER DEVELOPMENT FOR 3D-IC PHASED ARRAY MODULE." Master's thesis, University of Cincinnati, 2003. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1049977754

    Chicago Manual of Style (17th edition)

ucin1049977754
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© 2003, all rights reserved.
This open access ETD is published by University of Cincinnati and OhioLINK.