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ucin1053095076.pdf (5.83 MB)
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Abstract Header
SiC Thin-Films on Insulating Substrates for Robust MEMS-Applications
Author Info
Chen, Lin
Permalink:
http://rave.ohiolink.edu/etdc/view?acc_num=ucin1053095076
Abstract Details
Year and Degree
2003, PhD, University of Cincinnati, Engineering : Electrical Engineering.
Abstract
MEMS applications require that large area of uniform SiC films is formed on insulating substrates or sacrificial layers. For electrically controlled MEMS devices,
in-situ
N
2
-doped 3C-SiC thin-films have been grown by low-pressure chemical vapor deposition (LPCVD) on low-stress, amorphous Si
3
N
4
/p-Si(111) substrate using the single organosilane precursor trimethylsilane [(CH
3
)
3
SiH]. The effects of N
2
flow rate and growth temperature on the electrical properties of SiC films were investigated by Hall Effect measurements. The electron carrier concentration is between 10
17
~10
18
/cm
3
. The lowest resistivities at 400 K and 300 K are 1.12x10
-2
and 1.18x10
-1
Ω•cm, respectively. The corresponding sheet resistances are 75.02 and 790.36 Ω/square. The SiC film structure was studied by X-ray diffraction (XRD). The 3C-SiC films oriented in the <111> direction with a 2θ peak at 35.5° and line widths between 0.18~0.25° were obtained. The SiC-Si
3
N
4
interface is very smooth and free of voids. To pattern the SiC films into the desired structural shapes, selective etching is required. The inductively coupled plasma (ICP) etching of 3C-SiC films was then examined in both NF
3
/Ar and Cl
2
/Ar mixtures. Two different mask materials (ITO and Shipley 1818 photo-resist) were compared. The effects of RF power, DC bias, ICP power and gas flow ratio on etch rates have been discussed. Furthermore, a novel fiber-optic temperature sensor, which is rugged, compact, stable, and can be easily fabricated, has been developed by using the SiC thin-film grown on sapphire substrate. The film thickness was optimized to 2~3 um, while the optimal 3MS flow rate ranged from 35~40 sccm to produce an optically flat SiC film. The sensors were operated at temperature from 22° to 540°C. The shifts in resonance minima versus temperature from the reflection spectra fit a linear function, giving a relative temperature sensitivity of 1.9x10-5/°C. The capability of providing a ±3 °C accuracy was discovered at 532°C in a wide-open ambient, through a 14-days operating life.
Committee
Dr. Andrew J. Steckl (Advisor)
Pages
168 p.
Keywords
SiC on insulating substrate
;
LPCVD
;
ICP etching
;
MEMS
;
Fabry-Perot Interferometer
Recommended Citations
Refworks
EndNote
RIS
Mendeley
Citations
Chen, L. (2003).
SiC Thin-Films on Insulating Substrates for Robust MEMS-Applications
[Doctoral dissertation, University of Cincinnati]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1053095076
APA Style (7th edition)
Chen, Lin.
SiC Thin-Films on Insulating Substrates for Robust MEMS-Applications.
2003. University of Cincinnati, Doctoral dissertation.
OhioLINK Electronic Theses and Dissertations Center
, http://rave.ohiolink.edu/etdc/view?acc_num=ucin1053095076.
MLA Style (8th edition)
Chen, Lin. "SiC Thin-Films on Insulating Substrates for Robust MEMS-Applications." Doctoral dissertation, University of Cincinnati, 2003. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1053095076
Chicago Manual of Style (17th edition)
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Document number:
ucin1053095076
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Copyright Info
© 2003, all rights reserved.
This open access ETD is published by University of Cincinnati and OhioLINK.