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DEVELOPMENT OF A MICRO LOOP HEAT PIPE, A NOVEL MEMS SYSTEM BASED ON THE CPS TECHNOLOGY

SHUJA, AHMED
http://rave.ohiolink.edu/etdc/view?acc_num=ucin1054220863

Abstract Details

2003, MS, University of Cincinnati, Engineering : Electrical Engineering.
Work has been carried out to help develop a potentially revolutionary planar microLHP (Micro Loop Heat Pipe) in a collaborative team effort. The author has made several contributions including considerable improvements in the area of CPS (Coherent Porous Silicon) etching in which the etch rate was increased by an order of magnitude from 0.08 mm/min to 1mm/min. The reliability of the CPS etching process was increased from 10% to over 90%. Different modes of CPS etching were explored that include potentiostatic and galvanostatic. The importance of a Si3N4 passivation layer during CPS etching is discussed. The porosity of wicks used in the LHP test was increased from 6% to 25-40%. A characterization technique was introduced to cut down time between CPS etch runs. Multiple packaging issues were addressed such as the idea of using a secondary wick in the CPS based LHP and the intricate issue of evacuating and backfilling this microfludic MEMS device. The first ever closed loop test results gathered by the author are presented and discussed. A introduction into the thermal modeling of the LHP and evaporator package is discussed. A full model of the CPS based LHP is under development by colleagues in the mechanical engineering department. Finally, known areas of improvement in the CPS based LHP are discussed.
Dr. H.T. Henderson (Advisor)
264 p.
MEMS; loop heat pipe; macro porous silicon; micro fabrication

Recommended Citations

Citations

  • SHUJA, A. (2003). DEVELOPMENT OF A MICRO LOOP HEAT PIPE, A NOVEL MEMS SYSTEM BASED ON THE CPS TECHNOLOGY [Master's thesis, University of Cincinnati]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1054220863

    APA Style (7th edition)

  • SHUJA, AHMED. DEVELOPMENT OF A MICRO LOOP HEAT PIPE, A NOVEL MEMS SYSTEM BASED ON THE CPS TECHNOLOGY. 2003. University of Cincinnati, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=ucin1054220863.

    MLA Style (8th edition)

  • SHUJA, AHMED. "DEVELOPMENT OF A MICRO LOOP HEAT PIPE, A NOVEL MEMS SYSTEM BASED ON THE CPS TECHNOLOGY." Master's thesis, University of Cincinnati, 2003. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1054220863

    Chicago Manual of Style (17th edition)

ucin1054220863
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© 2003, all rights reserved.
This open access ETD is published by University of Cincinnati and OhioLINK.