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ucin1060889327.pdf (884.4 KB)
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Abstract Header
OPTIMAL PREVENTIVE MAINTENANCE SCHEDULING IN SEMICONDUCTOR FABS
Author Info
CRABTREE, JASON PAUL
Permalink:
http://rave.ohiolink.edu/etdc/view?acc_num=ucin1060889327
Abstract Details
Year and Degree
2003, MS, University of Cincinnati, Engineering : Electrical Engineering.
Abstract
Preventive maintenance is a valuable tool in minimizing unexpected tool downtime in semiconductor fabs. This thesis is spawned from the research project, "Preventive Maintenance1 in Semiconductor Fabs", sponsored by the Semiconductor Research Corporation (SRC) and International SEMATECH. The project is a joint venture between the University of Cincinnati and University of Maryland that looks to improve the planning and scheduling of preventive maintenance (PM) on tools in semiconductor fabs. The project proposes a two-level hierarchical optimization structure that considers important factors such as the work-in-progress (WIP) at a tool and the complex relationships between the chambers of a cluster tool. This thesis focuses on the lower level of the aforementioned hierarchy that deals with PM scheduling. It expands on the work accomplished thus far in the project, specifically analyzing and fixing current issues with the PM scheduling algorithm and creating a software implementation of the scheduling algorithm.
Committee
Dr. Emmanuel Fernandez (Advisor)
Pages
84 p.
Keywords
preventive maintenance
;
semiconductor
;
cluster tool
;
optimization
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Citations
CRABTREE, J. P. (2003).
OPTIMAL PREVENTIVE MAINTENANCE SCHEDULING IN SEMICONDUCTOR FABS
[Master's thesis, University of Cincinnati]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1060889327
APA Style (7th edition)
CRABTREE, JASON.
OPTIMAL PREVENTIVE MAINTENANCE SCHEDULING IN SEMICONDUCTOR FABS.
2003. University of Cincinnati, Master's thesis.
OhioLINK Electronic Theses and Dissertations Center
, http://rave.ohiolink.edu/etdc/view?acc_num=ucin1060889327.
MLA Style (8th edition)
CRABTREE, JASON. "OPTIMAL PREVENTIVE MAINTENANCE SCHEDULING IN SEMICONDUCTOR FABS." Master's thesis, University of Cincinnati, 2003. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1060889327
Chicago Manual of Style (17th edition)
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Document number:
ucin1060889327
Download Count:
963
Copyright Info
© 2003, all rights reserved.
This open access ETD is published by University of Cincinnati and OhioLINK.