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Synthesis and Gas Sensing Properties of MOD Ni-Zr02 Cermet Films on Silicon Substrate

Moghe, Ameya S.
http://rave.ohiolink.edu/etdc/view?acc_num=ucin1131983774

Abstract Details

2005, MS, University of Cincinnati, Engineering : Materials Science.
Inexpensive miniaturized gas sensing elements detecting various gases with high sensitivity, good thermal stability, and short response time are in high demand. Compatibility of thin films with the silicon technology is the key towards realizing such sensors. High purity Ni-ZrO2 precursor solutions were synthesized and spin deposited by MOD technique on Si substrate and reduced sintered (700-750C/20-30 mins) achieving required surface resistivity. The results show divalent nickel to be 4 coordinated (presence being ¼ of the organic solvents), forming a planar tetragonal polymeric network. Increase/decrease in solvent/solute ratio has shown network instability, increasing the surface resistivity suggestive of +2 metal coordination. Current envelopes and Resistance Vs Temperature responses were measured in the presence of gases like N2, CH4, and O2 for its applications in gas sensing. Due to the high TCR and higher resistance sensitivity to the environment, these films have shown to be potential candidates for gas sensing applications.
Dr. Relva Buchanan (Advisor)
115 p.
gas sensors; MOD technique; Cermet; Syntehsis; Ni-Zr02

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Citations

  • Moghe, A. S. (2005). Synthesis and Gas Sensing Properties of MOD Ni-Zr02 Cermet Films on Silicon Substrate [Master's thesis, University of Cincinnati]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1131983774

    APA Style (7th edition)

  • Moghe, Ameya. Synthesis and Gas Sensing Properties of MOD Ni-Zr02 Cermet Films on Silicon Substrate. 2005. University of Cincinnati, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=ucin1131983774.

    MLA Style (8th edition)

  • Moghe, Ameya. "Synthesis and Gas Sensing Properties of MOD Ni-Zr02 Cermet Films on Silicon Substrate." Master's thesis, University of Cincinnati, 2005. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1131983774

    Chicago Manual of Style (17th edition)

ucin1131983774
1,111
© 2005, all rights reserved.
This open access ETD is published by University of Cincinnati and OhioLINK.