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MICROMACHINED MAGNETIC DEVICES FOR ELECTRON BEAM CONTROL IN THE ELECTRON BEAM MICROCOLUMN

Abstract Details

2007, PhD, University of Cincinnati, Engineering : Electrical Engineering.
This research studies an innovative micromagnetic method for electron beam control in the electron beam microcolumn. In order to realize the magnetic electron beam control in the electron beam microcolumn, three new micromachined magnetic devices have been designed, fabricated and characterized in this work. First, a magnetic microdeflector has been designed, fabricated, and characterized for the electron beam deflection/scanning in the EBMC. Experimental results showed that the developed magnetic microdeflector with a pole distances 0.5 mm linearly deflected the electron beam (280 eV) a distance of 0.21 mm with an electrical power of 3 mW. The realized magnetic microdeflector shows an excellent dynamic property with the reponse time of 25 ns for a step signal of 50 mA. The developed magnetic microdeflector has excellent capability of deflecting/scanning the electron beam in the electron beam microcolumn system with large scanning linearity and low power consumption. Second, a magnetic microstigmator has been designed, fabricated, and characterized for the electron beam astigmatism correction in the EBMC. Experimental results showed that the astigmatism of an electron beam (200 eV) was effectively corrected by the fabricated magnetic microstigmator with a low power consumption. Third, a magnetic microlens has been designed, simulated, fabricated, and tested for the electron beam focusing in an EBMC. The experimental results showed that, with a driving current of 150 mA, an electron beam of 1 keV was effectively focused by the developed magnetic microlens. Finally, the magnetic interference within the miniaturized magnetic electron beam control system consisting of the three developed magnetic devices has been modeled and simulated. The span range of the magnetic field distribution generated by each individual device has also been simulated and investigated. In summary, an innovative magnetic method for the electron beam control in the electron beam microcolumn has been introduced and fully demonstrated in this work. For the realization of the magnetic control method, three micromachined magnetic devices such as the magnetic microdeflector, the magnetic microstigmator, and the magnetic microlens have been successfully realized in this work for a miniaturized magnetic electron beam control system.
Dr. Chong H. Ahn (Advisor)
165 p.

Recommended Citations

Citations

  • RONG, R. (2007). MICROMACHINED MAGNETIC DEVICES FOR ELECTRON BEAM CONTROL IN THE ELECTRON BEAM MICROCOLUMN [Doctoral dissertation, University of Cincinnati]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1177358390

    APA Style (7th edition)

  • RONG, RONG. MICROMACHINED MAGNETIC DEVICES FOR ELECTRON BEAM CONTROL IN THE ELECTRON BEAM MICROCOLUMN. 2007. University of Cincinnati, Doctoral dissertation. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=ucin1177358390.

    MLA Style (8th edition)

  • RONG, RONG. "MICROMACHINED MAGNETIC DEVICES FOR ELECTRON BEAM CONTROL IN THE ELECTRON BEAM MICROCOLUMN." Doctoral dissertation, University of Cincinnati, 2007. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1177358390

    Chicago Manual of Style (17th edition)