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Photodefinable Polydimethylsiloxane (PDMS) Thin Films

JOTHIMUTHU, PREETHA
http://rave.ohiolink.edu/etdc/view?acc_num=ucin1212181335

Abstract Details

2008, MS, University of Cincinnati, Engineering : Electrical Engineering.
This work describes a new and simple method for direct patterning of polydimethylsiloxane (PDMS) thin films directly using benzophenone as photoinitiator. PDMS is one of the most widely used polymers for numerous applications, including lab-on-a-chip in biochips, microfluidics, biocompatibility and ease of surface modification. This popularity is primarily due to its low cost, material characteristics such as physical, chemical and thermal properties. Conventional PDMS fabrication methods involve fabrication of a negative master template upon which the elastomer mixture is cast and cured; repeating the process yields numerous replicas from a single master. In this work, benzophenone was used to make the PDMS photodefinable and thus directly patternable. The chemistry involved was confirmed with infrared spectroscopy. The photodefinable PDMS mixture (termed photoPDMS) was positive-acting and only sensitive to light below 365 nm, permitting processing under normal ambient light. A parametric study was conducted to optimize the fabrication conditions. Features as small as 50 μm have been successfully demonstrated using this process in planar and multi-level films. Due to the flexible nature of PDMS, single and dual-layer free-standing films were fabricated for shadow mask patterning on planar and curved surfaces. The developed photoPDMS process offers a number of key advantages, including elimination of the master fabrication, processing under normal ambient light conditions, fast and simpler fabrication, and all the material advantages of PDMS. The photoPDMS enables rapid prototyping of microfluidic devices and numerous other applications with substantially reduced time and costs.
Ian Papautsky, PhD (Committee Chair)
68 p.
Electrical Engineering; Engineering
PDMS; photoPDMS; microfluidics; MEMS; shadow mask

Recommended Citations

Citations

  • JOTHIMUTHU, P. (2008). Photodefinable Polydimethylsiloxane (PDMS) Thin Films [Master's thesis, University of Cincinnati]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1212181335

    APA Style (7th edition)

  • JOTHIMUTHU, PREETHA. Photodefinable Polydimethylsiloxane (PDMS) Thin Films. 2008. University of Cincinnati, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=ucin1212181335.

    MLA Style (8th edition)

  • JOTHIMUTHU, PREETHA. "Photodefinable Polydimethylsiloxane (PDMS) Thin Films." Master's thesis, University of Cincinnati, 2008. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1212181335

    Chicago Manual of Style (17th edition)

ucin1212181335
1,491
© 2008, all rights reserved.
This open access ETD is published by University of Cincinnati and OhioLINK.