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Characterization of Porous Anodic Aluminum Oxide Film by Combined Scattering Techniques

He, Xueying
http://rave.ohiolink.edu/etdc/view?acc_num=ucin1383645061

Abstract Details

2013, MS, University of Cincinnati, Engineering and Applied Science: Materials Science.
An approach based on a combination of ultra small angle x-ray scattering (USAXS), neutron reflectivity (NR) and x-ray reflectivity (XRR), is exploited to characterize anodic aluminum oxide film. The oxide film layer structure, the porosity, and porosity evolution was obtained. A combination of XRR and NR on the film yields the density and degree of hydration of the films. Aluminum of 1000 Â thickness was deposited on Si wafers by e-beam evaporation. Porous anodic aluminum oxide (AAO) films are formed by polarizing at constant voltage up to 20 V noble to the open circuit potential. USAXS shows that the pore size and interpore distance are fixed in the first 10 s after initiation of anodization. Pores then grow linearly in time at constant radius and interpore distance. The average AAO film density of the porous film at the air surface is 2.45 ± 0.20 g/cm3. The density of the "barrier" layer at the metal interface is 3.3 &plusmn: 0.2 g/cm3 which indicates that this layer is not as dense as a crystalline aluminum oxide. Although this study covers limited number of variables relevant to production of AAO films, it does show that scattering methods are powerful tools to determine quantitatively the structural parameters.
Dale Schaefer, Ph.D. (Committee Chair)
Relva Buchanan, Sc.D. (Committee Member)
Jude Iroh, Ph.D. (Committee Member)
61 p.
Materials Science
porous AAO films

Recommended Citations

Citations

  • He, X. (2013). Characterization of Porous Anodic Aluminum Oxide Film by Combined Scattering Techniques [Master's thesis, University of Cincinnati]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1383645061

    APA Style (7th edition)

  • He, Xueying. Characterization of Porous Anodic Aluminum Oxide Film by Combined Scattering Techniques. 2013. University of Cincinnati, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=ucin1383645061.

    MLA Style (8th edition)

  • He, Xueying. "Characterization of Porous Anodic Aluminum Oxide Film by Combined Scattering Techniques." Master's thesis, University of Cincinnati, 2013. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1383645061

    Chicago Manual of Style (17th edition)

ucin1383645061
3,013
© 2013, some rights reserved.Creative Commons License Characterization of Porous Anodic Aluminum Oxide Film by Combined Scattering Techniques by Xueying He is licensed under a Creative Commons Attribution-NonCommercial-NoDerivs 3.0 Unported License. Based on a work at etd.ohiolink.edu.
This open access ETD is published by University of Cincinnati and OhioLINK.