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Full text of this paper is not available in the ETD Center. Copies may be available for inter-library loan from University of Cincinnati or may be available for purchase from Proquest/UMI

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Silicon MEMS-Based Development and Characterization of Batch Fabricated Microneedles for Biomedical Applications

Rajaraman, Swaminathan
http://rave.ohiolink.edu/etdc/view?acc_num=ucin978636001

Abstract Details

2001, MS, University of Cincinnati, Engineering : Electrical Engineering.
The subject of this work is the fabrication and characterization of microneedles using the Coherent Porous Silicon (CPS) etching technology. This forms the bases for an integrated fluidic interchange system that can be used in drug delivery systems and in fluidic analysis systems. This work concentrates on the fabrication of microneedles and addresses issues that might influence the penetration of durable media with these microneedles. The microneedles have been fabricated using the CPS etching technology. The needles have a central silicon channel that can be used to carry fluids and a silicon dioxide sidewall that is used to penetrate biological media. When biological media are involved the issue of biocompatibility arises and a silicon dioxide sidewall eliminates that problem because of its relative inertness in bio-medical applications. Microneedle arrays with different diameters and different spacing between successive needles have been fabricated. Microneedles have been characterized with regard to sharpening of sidewalls, spacing between successive needles and microneedle sidewall thickness. These issues are key issues with regard to penetration of biological media and all of these issues have been treated extensively. Solutions have been suggested with supporting evidence to overcome the shortcomings of the CPS technology that affects the fabrication of microneedles to suit different applications. Needle testing has also been carried out and compression and shear stresses that these structures can withstand has been explored. Further tests have been carried out to determine the ability of these microneedle structures to penetrate polymer films in an attempt to replicate the real situation with skin/ artificial skin.
Dr. Thurman Henderson (Advisor)
1 p.
mems; micromachining; cps etching; microneedles; biological applications

Recommended Citations

Citations

  • Rajaraman, S. (2001). Silicon MEMS-Based Development and Characterization of Batch Fabricated Microneedles for Biomedical Applications [Master's thesis, University of Cincinnati]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=ucin978636001

    APA Style (7th edition)

  • Rajaraman, Swaminathan. Silicon MEMS-Based Development and Characterization of Batch Fabricated Microneedles for Biomedical Applications. 2001. University of Cincinnati, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=ucin978636001.

    MLA Style (8th edition)

  • Rajaraman, Swaminathan. "Silicon MEMS-Based Development and Characterization of Batch Fabricated Microneedles for Biomedical Applications." Master's thesis, University of Cincinnati, 2001. http://rave.ohiolink.edu/etdc/view?acc_num=ucin978636001

    Chicago Manual of Style (17th edition)

ucin978636001
© 2001, all rights reserved.
This open access ETD is published by University of Cincinnati and OhioLINK.