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Aerosol Jet Printing of SU-8 for Capacitor Applications

Williams, Richard A., III
http://rave.ohiolink.edu/etdc/view?acc_num=wright154357966830782

Abstract Details

2018, Master of Science (MS), Wright State University, Chemistry.
Additive manufacturing is a rapidly expanding field of research. Additive manufacturing and direct writing techniques used to fabricate printed electronics will enable the continued miniaturization of electronic devices as new materials and techniques are developed. In this study SU-8, a dielectric material commonly used in traditional fabrication, is adapted for use by aerosol jet printing, an additive manufacturing technique. Printing parameters are established and the effect of UV exposure and post-exposure baking (PEB) on the thickness and dielectric properties of the material are determined by profilometer and LCR measurements. Increasing the UV exposure is observed to lower the dielectric constant of the printed films. Increasing the temperature of the PEB is observed to lower the dielectric constant of SU-8 films, but increasing the PEB time is not observed to have any impact on the dielectric constant. The films produced by printing have similar dielectric properties compared to those fabricated by spin coating. The printing of SU-8 and carbon nanotubes (CNT) was utilized to fabricate an all-printed nanocomposite material. In addition, printed SU-8 capacitors are evaluated for their frequency dependence. Finally, the further improvement of SU-8 printing parameters for nanocomposite fabrication in future work is started.
Rachel Aga, Ph.D. (Advisor)
Emily Heckman, Ph.D. (Advisor)
David Dolson, Ph.D. (Committee Member)
Ioana Sizemore, Ph.D. (Committee Member)
82 p.
Chemistry
aerosol jet; printing; SU-8; capacitor; dielectric; additive manufacturing; direct writing

Recommended Citations

Citations

  • Williams, III, R. A. (2018). Aerosol Jet Printing of SU-8 for Capacitor Applications [Master's thesis, Wright State University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=wright154357966830782

    APA Style (7th edition)

  • Williams, III, Richard. Aerosol Jet Printing of SU-8 for Capacitor Applications. 2018. Wright State University, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=wright154357966830782.

    MLA Style (8th edition)

  • Williams, III, Richard. "Aerosol Jet Printing of SU-8 for Capacitor Applications." Master's thesis, Wright State University, 2018. http://rave.ohiolink.edu/etdc/view?acc_num=wright154357966830782

    Chicago Manual of Style (17th edition)

wright154357966830782
358
© 2018, some rights reserved.Creative Commons License Aerosol Jet Printing of SU-8 for Capacitor Applications by Richard A. Williams III is licensed under a Creative Commons Attribution-NonCommercial-NoDerivs 3.0 Unported License. Based on a work at etd.ohiolink.edu.
This open access ETD is published by Wright State University and OhioLINK.