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Preparation, properties, and structure of hydrogenated amorphous carbon films

Chen, Hsiung
http://rave.ohiolink.edu/etdc/view?acc_num=case1054566593

Abstract Details

1990, Doctor of Philosophy, Case Western Reserve University, Physics.
Hydrogenated amorphous carbon films (a-C:H) have been deposited on glass, fused silica, Si, Mo, Al, and 304 stainless steel at room temperature by plasma enhanced chemical vapor deposition (PECVD). The rf glow discharge and plasma kinetics of the deposition process were investigated. Negative self-bias voltage V b and gas pressure P were used as two major deposition parameters. The hydrogen concentration, internal stress, mass density, hardness, and thickness of the deposited films were measured. In the low energy deposition region, 0 > V b > -100 V, soft polymerlike films with high hydrogen concentration and low density were found. Hard diamondlike films with high stress were deposited in the bias voltage range, -100 V > V b > -1000 V. Dark graphitic films with low hydrogen concentration were grown at V b < -1000 V. The optical absorption of a series of a-C:H films have been measured. Optical energy gaps deduced from optical absorption data using the Tauc relation lie between 0.8 eV and 1.4 eV. Doping of a-C:H films by boron and sulfur is accompanied by an increasing number of gap states, i.e., the absorption coefficient is increased and the optical gap is reduced. The thermal stability was studied by thermal desorption spectroscopy and heat tre atment at atmospheric pressure. A structural study of a-C:H films was performed using data taken on our films and from literature sources. The relation between cluster size and the intensity ratio of Raman peaks was studied. A comparison of the films as described by the graphitic cluster two-phase (GCT) model, the random covalent network (RCN) model and the all-sp2 defect graphite (DG) model was made. The properties and structure of a-C:H films are sensitively dependent on the preparation conditions. Correlations between the deposition conditions, structure, and properties are determined.
R Hoffman (Advisor)
82 p.
Physics, Condensed Matter
Preparation properties structure hydrogenated amorphous carbon films

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Citations

  • Chen, H. (1990). Preparation, properties, and structure of hydrogenated amorphous carbon films [Doctoral dissertation, Case Western Reserve University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=case1054566593

    APA Style (7th edition)

  • Chen, Hsiung. Preparation, properties, and structure of hydrogenated amorphous carbon films. 1990. Case Western Reserve University, Doctoral dissertation. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=case1054566593.

    MLA Style (8th edition)

  • Chen, Hsiung. "Preparation, properties, and structure of hydrogenated amorphous carbon films." Doctoral dissertation, Case Western Reserve University, 1990. http://rave.ohiolink.edu/etdc/view?acc_num=case1054566593

    Chicago Manual of Style (17th edition)

case1054566593
615
© 1990, all rights reserved.
This open access ETD is published by Case Western Reserve University School of Graduate Studies and OhioLINK.