Skip to Main Content
Frequently Asked Questions
Submit an ETD
Global Search Box
Need Help?
Keyword Search
Participating Institutions
Advanced Search
School Logo
Files
File List
case1055777824.pdf (1.61 MB)
ETD Abstract Container
Abstract Header
Low-energy sputtering of Teflon by oxygen ion bombardment
Author Info
Lamouri, Abbas
Permalink:
http://rave.ohiolink.edu/etdc/view?acc_num=case1055777824
Abstract Details
Year and Degree
1991, Doctor of Philosophy, Case Western Reserve University, Physics.
Abstract
The interaction of low energy oxygen ions (12 to 185 eV) with Teflon surfaces has been investigated using both continuous and pulsed ion bombardment. A quadrupole mass spectrometer detected particles produced by this bombardment. Strong signals were observed at 31, 50, and 69 amu, which are attributed to CF, CF
2
, and CF
3
molecules. The data support the conclusion that these molecules are not the direct products of the ion bombardment. Fluorine and carbon atoms are assumed to be the direct products, sputtered with such high velocities that the efficiency for their detection by the mass spectrometer is low. The CF, CF
2
, and CF
3
data obtained with continuous ion bombardment are used to deduce sputter yields (equivalent CF
2
units removed per incident ion). These yields increase from 0.013 at 12eV to 0.17 at 185 eV.
Committee
R. Hoffman (Advisor)
Pages
88 p.
Subject Headings
Physics, Condensed Matter
Keywords
Low-energy sputtering
;
Teflon
;
oxygen ion bombardment
Recommended Citations
Refworks
EndNote
RIS
Mendeley
Citations
Lamouri, A. (1991).
Low-energy sputtering of Teflon by oxygen ion bombardment
[Doctoral dissertation, Case Western Reserve University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=case1055777824
APA Style (7th edition)
Lamouri, Abbas.
Low-energy sputtering of Teflon by oxygen ion bombardment.
1991. Case Western Reserve University, Doctoral dissertation.
OhioLINK Electronic Theses and Dissertations Center
, http://rave.ohiolink.edu/etdc/view?acc_num=case1055777824.
MLA Style (8th edition)
Lamouri, Abbas. "Low-energy sputtering of Teflon by oxygen ion bombardment." Doctoral dissertation, Case Western Reserve University, 1991. http://rave.ohiolink.edu/etdc/view?acc_num=case1055777824
Chicago Manual of Style (17th edition)
Abstract Footer
Document number:
case1055777824
Download Count:
637
Copyright Info
© 1991, all rights reserved.
This open access ETD is published by Case Western Reserve University School of Graduate Studies and OhioLINK.