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The Mechanical Properties of Submicron-Thick, Large-Area 3C-SiC Diaphragms

Rawlinson, Patrick Theodore
http://rave.ohiolink.edu/etdc/view?acc_num=case1328296558

Abstract Details

2012, Master of Sciences (Engineering), Case Western Reserve University, EECS - Electrical Engineering.
This thesis presents the results of an investigation to characterize the mechanical properties of submicron-thick, single crystalline cubic silicon carbide (3C-SiC) films. 3C-SiC films in this thickness range are of significant interest due to their potential utility in MEMS and NEMS applications, and information regarding the mechanical properties of these films is critically important. The load-deflection technique was used to determine the Young’s modulus and residual stress of epitaxially-grown (100) 3C-SiC films that were bulk micromachined into suspended diaphragms. Diaphragm thicknesses were nominally 500 nm and 250 nm. It was found that the films have residual stresses that are high and tensile (1.21GPa), which affected accurate determination of the Young’s modulus. The durability of these films, as well as 2 µm-thick polycrystalline 3C-SiC films, was investigated by subjecting the structures to cyclic loading. No distinguishable differences were observed in the residual stress and Young’s modulus after 30,000 load-deflection cycles.
Christian Zorman (Advisor)
Francis Merat (Committee Member)
Swarup Bhunia (Committee Member)
67 p.
Engineering; Mechanics; Nanotechnology
Silicon Carbide, Diaphragms; MEMS; NEMS; Mechanical Properties; Thin Films

Recommended Citations

Citations

  • Rawlinson, P. T. (2012). The Mechanical Properties of Submicron-Thick, Large-Area 3C-SiC Diaphragms [Master's thesis, Case Western Reserve University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=case1328296558

    APA Style (7th edition)

  • Rawlinson, Patrick. The Mechanical Properties of Submicron-Thick, Large-Area 3C-SiC Diaphragms. 2012. Case Western Reserve University, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=case1328296558.

    MLA Style (8th edition)

  • Rawlinson, Patrick. "The Mechanical Properties of Submicron-Thick, Large-Area 3C-SiC Diaphragms." Master's thesis, Case Western Reserve University, 2012. http://rave.ohiolink.edu/etdc/view?acc_num=case1328296558

    Chicago Manual of Style (17th edition)

case1328296558
780
© 2012, all rights reserved.
This open access ETD is published by Case Western Reserve University School of Graduate Studies and OhioLINK.