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Carter Heinert Thesis.pdf (5.96 MB)

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IMPROVING THE DESIGN AND FABRICATION OF BORON-DOPED DIAMOND-ON-POLYMER IMPLANTABLE MICROELECTRODES

Heinert, Carter J
http://rave.ohiolink.edu/etdc/view?acc_num=case1428068066

Abstract Details

2015, Master of Sciences, Case Western Reserve University, Chemical Engineering.
Diamond-on-polymer microelectrodes are promising devices. We explored replacement of the polynorbornene support with parylene. We also implemented a process to grow flanged-shaped diamond structures to be more reliably secured in the polymer. Hydrogen-terminated diamond films were grown on oxidized silicon and coated with polynorbornene, parylene, or parylene with adhesion promoters. Samples were immersed in a simulated human saline environment for 8 months and the adhesion and fracture location assessed. Polynorbornene was the most adhesive, avoiding fracture at forces >450 N/m2. Parylene-coated samples fractured around 40 N/m2, and the adhesion promotor was ineffective likely due to diamond surface hydrogenation. A microfabrication process was developed to create flanged diamond structures to anchor into the polymer. Diamond growth and silicon etch times were varied. A diamond film thickness >1¿m resulted in structures that remained intact during wet processing. Future work will optimize growth conditions for complete feature fill and will assess their anchoring.
Martin Heidi, Dr. (Committee Chair)
Mohan Sankaran, Dr. (Committee Member)
Zorman Christopher, Dr. (Committee Member)
76 p.
Chemical Engineering; Engineering
Diamond, Boron, Doping, Microfabrication, Electrode, Sensor

Recommended Citations

Citations

  • Heinert, C. J. (2015). IMPROVING THE DESIGN AND FABRICATION OF BORON-DOPED DIAMOND-ON-POLYMER IMPLANTABLE MICROELECTRODES [Master's thesis, Case Western Reserve University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=case1428068066

    APA Style (7th edition)

  • Heinert, Carter. IMPROVING THE DESIGN AND FABRICATION OF BORON-DOPED DIAMOND-ON-POLYMER IMPLANTABLE MICROELECTRODES . 2015. Case Western Reserve University, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=case1428068066.

    MLA Style (8th edition)

  • Heinert, Carter. " IMPROVING THE DESIGN AND FABRICATION OF BORON-DOPED DIAMOND-ON-POLYMER IMPLANTABLE MICROELECTRODES ." Master's thesis, Case Western Reserve University, 2015. http://rave.ohiolink.edu/etdc/view?acc_num=case1428068066

    Chicago Manual of Style (17th edition)

case1428068066
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© 2015, all rights reserved.
This open access ETD is published by Case Western Reserve University School of Graduate Studies and OhioLINK.