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Sensing and Control of MEMS Accelerometers Using Kalman Filter

Zhang, Kai
http://rave.ohiolink.edu/etdc/view?acc_num=csu1293152677

Abstract Details

2010, Master of Science in Electrical Engineering, Cleveland State University, Fenn College of Engineering.
Surface micromachined low-capacitance MEMS capacitive accelerometers which integrated CMOS readout circuit generally have a noise above 0.02g. Force-to-rebalance feedback control that is commonly used in MEMS accelerometers can improve the performances of accelerometers such as increasing their stability, bandwidth and dynamic range. However, the controller also increases the noise floor. There are two major sources of the noise in MEMS accelerometer. They are electronic noise from the CMOS readout circuit and thermal-mechanical Brownian noise caused by damping. Kalman filter is an effective solution to the problem of reducing the effects of the noises through estimating and canceling the states contaminated by noise. The design and implementation of a Kalman filter for a MEMS capacitive accelerometer is presented in the thesis in order to filter out the noise mentioned above while keeping its good performance under feedback control. The dynamic modeling of the MEMS accelerometer system and the controller design based on the model are elaborated in the thesis. Simulation results show the Kalman filter gives an excellent noise reduction, increases the dynamic range of the accelerometer, and reduces the displacement of the mass under a closed-loop structure.
Lili Dong (Committee Chair)
Charles Alexander (Committee Member)
Siu-Tung Yau (Committee Member)
ACCELEROMETERS; KALMAN FILTER; KALMAN; MEMS ACCELEROMETERS; EKF; closed-loop; noise

Recommended Citations

Citations

  • Zhang, K. (2010). Sensing and Control of MEMS Accelerometers Using Kalman Filter [Master's thesis, Cleveland State University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=csu1293152677

    APA Style (7th edition)

  • Zhang, Kai. Sensing and Control of MEMS Accelerometers Using Kalman Filter. 2010. Cleveland State University, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=csu1293152677.

    MLA Style (8th edition)

  • Zhang, Kai. "Sensing and Control of MEMS Accelerometers Using Kalman Filter." Master's thesis, Cleveland State University, 2010. http://rave.ohiolink.edu/etdc/view?acc_num=csu1293152677

    Chicago Manual of Style (17th edition)

csu1293152677
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© 2010, all rights reserved.
This open access ETD is published by Cleveland State University and OhioLINK.