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Development of a magnetic suspension system and its applications in nano-imprinting and nano-metrology

Kuo, Shih-Kang
http://rave.ohiolink.edu/etdc/view?acc_num=osu1054236218

Abstract Details

2003, Doctor of Philosophy, Ohio State University, Mechanical Engineering.
The objective of this research is to develop an improved magnetic suspension system for ultra precision motion control and to demonstrate its feasibility in the area of nano-technology via two applications, namely nano-imprinting and nano-metrology. In order to increase the travel range in horizontal axes and to reduce mechanical vibrations in the formerly developed magnetic suspension system, both actuation scheme and laser measurement systems are modified. Adaptive control and disturbance observer were employed to compensate model variations due to varying airgaps in DC electromagnets and to achieve uniformly high precision motion control throughout the workspace of the system. In the first application, a nano-metrology system consisted of an optical pick up head from a compact disc drive and the magnetic suspension system was developed. As the optical pick up head is a 1D probe, the magnetic suspension system was employed as a precision motion control scanning stage to obtain surface geometry of miniature objects having 2½ D features. Experiment results demonstrated that the developed metrology system can provide nano-meter measurement resolution over several millimeters range. In the second application, a nano-imprinting procedure was employed to fabricate miniature pores on a polymer membrane. In order to produce high aspect ratio, nano-sized pores over a large area, a nano-imprinting unit was developed to facilitate the process, along with the developed magnetic suspension system incorporated into the procedure to provide precise position and orientation control. System integration has been performed and preliminary experiments have been performed to show the feasibility of the process.
Chia-Hsiang Menq (Advisor)
175 p.
Engineering, Mechanical
magnetic suspension; motion control; nano-metrology; nano-imprinting; system identification; disturbance observer

Recommended Citations

Citations

  • Kuo, S.-K. (2003). Development of a magnetic suspension system and its applications in nano-imprinting and nano-metrology [Doctoral dissertation, Ohio State University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=osu1054236218

    APA Style (7th edition)

  • Kuo, Shih-Kang. Development of a magnetic suspension system and its applications in nano-imprinting and nano-metrology. 2003. Ohio State University, Doctoral dissertation. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=osu1054236218.

    MLA Style (8th edition)

  • Kuo, Shih-Kang. "Development of a magnetic suspension system and its applications in nano-imprinting and nano-metrology." Doctoral dissertation, Ohio State University, 2003. http://rave.ohiolink.edu/etdc/view?acc_num=osu1054236218

    Chicago Manual of Style (17th edition)

osu1054236218
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© 2003, all rights reserved.
This open access ETD is published by The Ohio State University and OhioLINK.