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Angle-Resolved X-Ray Photoemission Spectroscopy of Self-Assembled Polymer Films on AlGaN/GaN Field Effect Transistors

Wu, Hao-Hsuan
http://rave.ohiolink.edu/etdc/view?acc_num=osu1305639462

Abstract Details

2011, Master of Science, Ohio State University, Electrical and Computer Engineering.
We used angle-resolved X-ray photoemission spectroscopy (AR-XPS), atomic force microscopy (AFM), and Kelvin probe force microscopy (KPFM) to characterize the chemical composition, depth distribution, and uniformity of 3-aminopropyltriethoxysilane (APTES) and 3-aminopropyldimethylethoxysilane (APDMES) polymer film layers on the channel surface of plasma-oxidized AlGaN/GaN heterojunction field effect transistors (HFETs). AFM and KPFM reveal smooth and uniform surfaces of plasma-oxidized AlGaN, APTES, and APDMES. AR-XPS yields 0.875 +0.036 nm for the AlGaN/GaN plasma oxide thickness, as well as 1.78±0.09 nm for the APTES versus 1.5±0.06 nm for the APDMES self-assembled monolayer. AR-XPS confirms the relative differences in APTES versus APDMES film thickness, as well as the relative spatial positioning of nitrogen versus silicon and oxygen based on their expected surface conformations. These results highlight the utility of AR-XPS to characterize the spatial distribution of elements within nanoscale organic-oxide-GaN interfaces.
Leonard Brillson (Advisor)
Wu Lu (Committee Member)
58 p.
Electrical Engineering
AlGaN; biosensor; heterojunction field effect transistor; HFET; X-ray Photoelectron Spectroscopy; atomic force microscopy; Kelvin probe force microscopy; 3-aminopropyltriethoxysilane (APTES); 3-aminopropyldimethylethoxysilane (APDMES)

Recommended Citations

Citations

  • Wu, H.-H. (2011). Angle-Resolved X-Ray Photoemission Spectroscopy of Self-Assembled Polymer Films on AlGaN/GaN Field Effect Transistors [Master's thesis, Ohio State University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=osu1305639462

    APA Style (7th edition)

  • Wu, Hao-Hsuan. Angle-Resolved X-Ray Photoemission Spectroscopy of Self-Assembled Polymer Films on AlGaN/GaN Field Effect Transistors. 2011. Ohio State University, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=osu1305639462.

    MLA Style (8th edition)

  • Wu, Hao-Hsuan. "Angle-Resolved X-Ray Photoemission Spectroscopy of Self-Assembled Polymer Films on AlGaN/GaN Field Effect Transistors." Master's thesis, Ohio State University, 2011. http://rave.ohiolink.edu/etdc/view?acc_num=osu1305639462

    Chicago Manual of Style (17th edition)

osu1305639462
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© 2011, all rights reserved.
This open access ETD is published by The Ohio State University and OhioLINK.