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The Design and Fabrication of a Low-Cost, DMD Based Projection Lithography System

McCray, David L., Jr
http://rave.ohiolink.edu/etdc/view?acc_num=osu1345225235

Abstract Details

2012, Master of Science, Ohio State University, Industrial and Systems Engineering.
A low-cost, digital micro-mirror (DMD) based projection lithography machine was designed and constructed. The base of the machine utilizes a surplus Dover Instruments Corp. hard drive tester. The superstructure of the machine is constructed from aluminum plates, which may be bolted together in different positions to allow reconfiguration. The machine offers a positional resolution of 0.1 micron in 2 axes. A vacuum work holding device was also designed, built, and evaluated, along with a commercial alternative. It is determined that these devices may hold a silicon wafer flat within approximately +- 0.7 micron. The final structure is tested for straightness of axis travel, which results in a maximum deviation of +/- 4 arcseconds. The optical system is also evaluated for its ability to produce an image and replicate a pattern loaded onto the DMD via a PC. A photoresist-covered wafer is exposed using multiple exposure times and patterns. The system is able to replicate the more basic patterns, but needs improvement to shrink feature size and improve definition. It is also found that the optical system needs modification to improve efficiency. Once the optical system is improved, this machine should be an excellent platform for scanning or step-and-scan lithography, and be able to produce small features covering an entire wafer.
Allen Yi, PhD (Advisor)
Jose Castro, PhD (Committee Member)
101 p.
Industrial Engineering
digital micromirror device; DMD; lithography

Recommended Citations

Citations

  • McCray, Jr, D. L. (2012). The Design and Fabrication of a Low-Cost, DMD Based Projection Lithography System [Master's thesis, Ohio State University]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=osu1345225235

    APA Style (7th edition)

  • McCray, Jr, David. The Design and Fabrication of a Low-Cost, DMD Based Projection Lithography System. 2012. Ohio State University, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=osu1345225235.

    MLA Style (8th edition)

  • McCray, Jr, David. "The Design and Fabrication of a Low-Cost, DMD Based Projection Lithography System." Master's thesis, Ohio State University, 2012. http://rave.ohiolink.edu/etdc/view?acc_num=osu1345225235

    Chicago Manual of Style (17th edition)

osu1345225235
3,119
© 2012, all rights reserved.
This open access ETD is published by The Ohio State University and OhioLINK.