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Investigation of Micro Channel Fabrication by Electroforming

Dasari, Praveen K.
http://rave.ohiolink.edu/etdc/view?acc_num=toledo1289937833

Abstract Details

2010, Master of Science in Mechanical Engineering, University of Toledo, Mechanical Engineering.
Nanotechnology has the potential to create many new materials and devices with wide range of applications. Nanofabrication is the design and manufacture of devices with dimensions measured in nanometers. Development of an economic and reliable technique for the fabrication of reproducible micro channels has been an important challenge in this field. Feasibility of fabricating reproducible electrode gaps based on electroforming is investigated in this study. The proposed technique is investigated by both theoretical modeling and experimental methods. Finite Element Analysis (FEA) technique is implemented to investigate the proposed hypothesis of fabrication of micro channels on thin films coated on insulator substrate. The gap formation for aluminum, gold, and tungsten oxide is attempted. The influence of various parameters on the heat transfer phenomenon during the electroforming is studied. Micro channel formation for gold is also investigated experimentally. Surface measurements were conducted to investigate the electroforming process and the current-voltage characteristics are collected during the electroforming process. The experimental results obtained are compared with the Finite Element Analysis based modeling data. The simulation and experimental results confirm the feasibility of the fabrication of micro gaps by the proposed electroforming technique. It is found that proposed method can be employed to produce micro channels using a wide range of materials such as metals, metal oxides and compound semiconductors.
Ahalapitiya Jayatissa, PhD (Advisor)
Mehdi Pourazady, PhD (Committee Member)
Hongyan Zhang, PhD (Committee Member)
93 p.
Materials Science; Mechanical Engineering
micro; electroforming; fabrication; comsol; simulation; finite element analysis

Recommended Citations

Citations

  • Dasari, P. K. (2010). Investigation of Micro Channel Fabrication by Electroforming [Master's thesis, University of Toledo]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=toledo1289937833

    APA Style (7th edition)

  • Dasari, Praveen. Investigation of Micro Channel Fabrication by Electroforming. 2010. University of Toledo, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=toledo1289937833.

    MLA Style (8th edition)

  • Dasari, Praveen. "Investigation of Micro Channel Fabrication by Electroforming." Master's thesis, University of Toledo, 2010. http://rave.ohiolink.edu/etdc/view?acc_num=toledo1289937833

    Chicago Manual of Style (17th edition)

toledo1289937833
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© 2010, all rights reserved.
This open access ETD is published by University of Toledo and OhioLINK.