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Structural and Fluidic Analysis of a Pressure-Controlled Torsion Type Check Microvalve

Hong, Chien-Chong
http://rave.ohiolink.edu/etdc/view?acc_num=ucin983798808

Abstract Details

2001, MS, University of Cincinnati, Engineering : Electrical Engineering.
The object of this thesis is to develop a pressure controlled torsion-type check microvalve for a high operating pressure. Both structural and fluidic analysis of the check microvalve has been performed and then a prototype of the microvalve has been fabricated and characterized, and then its performance has been compared with the simulated results. Structural and fluidic simulations were performed separately and then merged for a microvalve. Static and dynamic simulations of the structure were done by ANSYS. CFD-ACE was used for fluidic analysis of the valve. Nickel was chosen as a structural material of the torsion passive valve. From the simulation results with the Nickel structure, this valve showed its performance range of an operation pressure of 100 psi and an operation frequency of 1800 Hz. In order to construct the Nickel torsion structure, UV-LIGA technique was used. Inlets, outlets, and valve seats were fabricated on silicon substrates, and then the substrates were bonded to construct a microvalve, after the completion of the fabrication of Nickel torsion plate. The fabricated microvalve was then characterized in terms of applied pressure vs. displacement/flow rate using DI water. The results obtained from both simulations and measurements were compared and showed reasonably good matching. From this work, structural and fluidic analysis for a check microvalve has been performed and their validation has been successfully proved from the experimental results of the fabricated device.
Dr. Chong Ahn (Advisor)
43 p.
MEMS; Microfluid; Microvalve; Simulation; Micro-Machine

Recommended Citations

Citations

  • Hong, C.-C. (2001). Structural and Fluidic Analysis of a Pressure-Controlled Torsion Type Check Microvalve [Master's thesis, University of Cincinnati]. OhioLINK Electronic Theses and Dissertations Center. http://rave.ohiolink.edu/etdc/view?acc_num=ucin983798808

    APA Style (7th edition)

  • Hong, Chien-Chong. Structural and Fluidic Analysis of a Pressure-Controlled Torsion Type Check Microvalve. 2001. University of Cincinnati, Master's thesis. OhioLINK Electronic Theses and Dissertations Center, http://rave.ohiolink.edu/etdc/view?acc_num=ucin983798808.

    MLA Style (8th edition)

  • Hong, Chien-Chong. "Structural and Fluidic Analysis of a Pressure-Controlled Torsion Type Check Microvalve." Master's thesis, University of Cincinnati, 2001. http://rave.ohiolink.edu/etdc/view?acc_num=ucin983798808

    Chicago Manual of Style (17th edition)

ucin983798808
1,280
© 2001, all rights reserved.
This open access ETD is published by University of Cincinnati and OhioLINK.